{"product_id":"brooks-instrument-5853iaba2d1g2ba-thermal-mass-flow-controller","title":"Brooks Instrument 5853IABA2D1G2BA Thermal Mass Flow Controller","description":"\u003cdiv\u003e\u003cp\u003eBrooks Instrument 5853IABA2D1G2BA Thermal Mass Flow Controller is a high-precision gas flow control device in the Brooks SLA5800 family, designed to measure and regulate gas flow in process lines using thermal-mass sensing. As an elastomer-sealed variant of Brooks’ thermal mass flow technology, it shares the family’s performance characteristics, including full-scale accuracy around 1% and repeatability of about 0.25% of rate. The 5850E\/SLA5800 family typically offers a flow range from 3 sccm to 30,000 sccm, a maximum pressure rating up to 1500 psi, and an operating temperature range of 5°C to 65°C, making it suitable for precise gas delivery in semiconductor, chemical, and lab processes. For integration and control, this MFC can be driven by Brooks’ 0250 series power supply\/readout\/control platform, providing setpoint control and readout in compact configurations.\u003c\/p\u003e\u003c\/div\u003e","brand":"BROOKS","offers":[{"title":"New","offer_id":51677333815598,"sku":null,"price":305.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_4d4b0d01-bc69-4e72-a83d-df73b6bf0e15.jpg?v=1769561326","url":"https:\/\/plgautomation.com\/products\/brooks-instrument-5853iaba2d1g2ba-thermal-mass-flow-controller","provider":"PLG Automation ","version":"1.0","type":"link"}