{"product_id":"industrial-01-20-02644-theta-drive-assembly","title":"Industrial 01-20-02644 Theta Drive Assembly","description":"\u003ch3 class=\"PDq2pG_selectionAnchorContainer\" data-end=\"16\" data-start=\"0\" data-section-id=\"17lc1ru\"\u003eDescription:\u003cspan class=\"PDq2pG_selectionAnchor\" aria-hidden=\"true\"\u003e\u003c\/span\u003e\n\u003c\/h3\u003e\n\u003cp data-end=\"636\" data-start=\"17\"\u003eThe Ultratech Stepper 01-20-02644 Theta Drive is a precision rotary drive assembly designed to provide accurate theta-axis rotation and wafer positioning in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech wafer steppers where it controls rotational alignment of the wafer stage to ensure precise pattern registration during lithography. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn theta drive mechanisms, preventive maintenance, and restoration of accurate wafer alignment performance. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"655\" data-start=\"638\" data-section-id=\"5ms9th\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-end=\"1208\" data-start=\"656\"\u003eThe Ultratech Stepper 01-20-02644 Theta Drive is commonly used in semiconductor wafer fabrication, MEMS manufacturing, advanced packaging, and research facilities operating Ultratech photolithography equipment. The theta drive provides controlled rotational movement of the wafer stage, enabling precise angular alignment required for high-resolution lithographic exposure. Compatibility should be verified using the original part number, revision level, and applicable Ultratech stepper model before installation. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"1239\" data-start=\"1210\" data-section-id=\"5hg6bl\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-end=\"1758\" data-start=\"1240\"\u003e• Brand: Ultratech Stepper\u003cbr data-end=\"1269\" data-start=\"1266\"\u003e• Part Number: 01-20-02644\u003cbr data-end=\"1298\" data-start=\"1295\"\u003e• Product Type: Theta Drive Assembly\u003cbr data-end=\"1337\" data-start=\"1334\"\u003e• Function: Precision wafer stage rotational positioning\u003cbr data-end=\"1396\" data-start=\"1393\"\u003e• Motion Type: Theta-Axis Rotary Drive\u003cbr data-end=\"1437\" data-start=\"1434\"\u003e• Compatible Equipment: Ultratech Wafer Stepper Systems\u003cbr data-end=\"1495\" data-start=\"1492\"\u003e• Mounting: OEM replacement assembly\u003cbr data-end=\"1534\" data-start=\"1531\"\u003e• Installation: Direct OEM replacement\u003cbr data-end=\"1575\" data-start=\"1572\"\u003e• Application: Semiconductor photolithography and wafer alignment systems\u003cbr data-end=\"1651\" data-start=\"1648\"\u003e• Designed for continuous-duty semiconductor manufacturing operation. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"1784\" data-start=\"1760\" data-section-id=\"1cz0398\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-is-only-node=\"\" data-is-last-node=\"\" data-end=\"1925\" data-start=\"1786\"\u003e• Ultratech Stepper 01-15-04611\u003cbr data-end=\"1820\" data-start=\"1817\"\u003e• Ultratech Stepper 01-15-03796\u003cbr data-end=\"1854\" data-start=\"1851\"\u003e• Ultratech Stepper 0556-700856-R\u003c\/p\u003e","brand":"Ultratech","offers":[{"title":"New","offer_id":51714363130158,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_e117ef31-8d28-4cb1-8101-4d5519881767.jpg?v=1770424139","url":"https:\/\/plgautomation.com\/products\/industrial-01-20-02644-theta-drive-assembly","provider":"PLG Automation ","version":"1.0","type":"link"}