{"product_id":"industrial-0513-4197-00-stage-servo-controller-board","title":"Industrial 0513-4197-00 Stage Servo Controller Board","description":"\u003cdiv class=\"\" data-turn-id-container=\"request-6a3be693-4000-83ec-acea-09e97e9e1ceb-47\" data-is-intersecting=\"true\"\u003e\n\u003csection class=\"text-token-text-primary w-full focus:outline-none has-data-writing-block:pointer-events-none [\u0026amp;:has([data-writing-block])\u0026gt;*]:pointer-events-auto R6Vx5W_threadScrollVars scroll-mb-[calc(var(--scroll-root-safe-area-inset-bottom,0px)+var(--thread-response-height))] scroll-mt-[calc(var(--header-height)+min(200px,max(70px,20svh)))]\" dir=\"auto\" data-turn-id=\"request-6a3be693-4000-83ec-acea-09e97e9e1ceb-47\" data-turn-id-container=\"request-6a3be693-4000-83ec-acea-09e97e9e1ceb-47\" data-testid=\"conversation-turn-691\" data-turn=\"assistant\"\u003e\n\u003cdiv class=\"text-base my-auto mx-auto pb-10 [--thread-content-margin:var(--thread-content-margin-xs,calc(var(--spacing)*4))] @w-sm\/main:[--thread-content-margin:var(--thread-content-margin-sm,calc(var(--spacing)*6))] @w-lg\/main:[--thread-content-margin:var(--thread-content-margin-lg,calc(var(--spacing)*16))] px-(--thread-content-margin)\"\u003e\n\u003cdiv data-conversation-screenshot-content=\"\" class=\"[--thread-content-max-width:40rem] @w-lg\/main:[--thread-content-max-width:48rem] mx-auto max-w-(--thread-content-max-width) flex-1 group\/turn-messages focus-visible:outline-hidden relative flex w-full min-w-0 flex-col agent-turn\"\u003e\n\u003cdiv class=\"flex max-w-full flex-col gap-4 grow\"\u003e\n\u003cdiv data-message-author-role=\"assistant\" data-message-id=\"58e0ffdc-ffbc-4481-8c18-567fb4fa44d1\" data-turn-start-message=\"true\" dir=\"auto\" data-message-model-slug=\"gpt-5-5\" class=\"min-h-8 text-message relative flex w-full flex-col items-end gap-2 text-start break-words whitespace-normal outline-none keyboard-focused:focus-ring [.text-message+\u0026amp;]:mt-1\" tabindex=\"0\"\u003e\n\u003cdiv class=\"flex w-full flex-col gap-1 empty:hidden\"\u003e\n\u003cdiv class=\"markdown prose dark:prose-invert wrap-break-word w-full dark markdown-new-styling\"\u003e\n\u003ch3 data-section-id=\"17lc1ru\" data-start=\"0\" data-end=\"16\"\u003eDescription:\u003c\/h3\u003e\n\u003cp data-start=\"17\" data-end=\"722\"\u003eThe Ultratech Stepper 0513-4197-00 Rev. 5 Stage Servo Board (Semifusion Model 151) is a high-performance motion control printed circuit board (PCB) designed to provide closed-loop servo control for the precision wafer stage in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech UltraStep 1000 wide-field wafer steppers where it controls stage positioning, velocity, and feedback to ensure accurate wafer alignment and exposure. Semiconductor equipment technicians and field service engineers use this servo board for replacement of failed motion control electronics, preventive maintenance, and restoration of precise stage performance. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5ms9th\" data-start=\"724\" data-end=\"741\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-start=\"742\" data-end=\"1350\"\u003eThe Ultratech Stepper 0513-4197-00 Rev. 5 Stage Servo Board is commonly used in semiconductor wafer fabrication, MEMS manufacturing, advanced packaging, and research facilities operating Ultratech UltraStep 1000 photolithography systems. Manufactured by Semifusion as Model 151, the board performs closed-loop servo control of the wafer stage, ensuring smooth motion, accurate positioning, and repeatable lithography performance. Compatibility should be verified using the original part number, revision level, and applicable Ultratech stepper model before installation. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5hg6bl\" data-start=\"1352\" data-end=\"1381\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-start=\"1382\" data-end=\"1938\"\u003e• Brand: Ultratech Stepper\u003cbr data-start=\"1408\" data-end=\"1411\"\u003e• Part Number: 0513-4197-00\u003cbr data-start=\"1438\" data-end=\"1441\"\u003e• Revision: Rev. 5\u003cbr data-start=\"1459\" data-end=\"1462\"\u003e• Manufacturer: Semifusion Corp.\u003cbr data-start=\"1494\" data-end=\"1497\"\u003e• Model: 151\u003cbr data-start=\"1509\" data-end=\"1512\"\u003e• Product Type: Stage Servo Board \/ Motion Control PCB\u003cbr data-start=\"1566\" data-end=\"1569\"\u003e• Function: Closed-loop wafer stage servo control\u003cbr data-start=\"1618\" data-end=\"1621\"\u003e• Board Type: Industrial Motion Control Printed Circuit Board (PCB)\u003cbr data-start=\"1688\" data-end=\"1691\"\u003e• Compatible Equipment: Ultratech UltraStep 1000 Wide Field Wafer Stepper Systems\u003cbr data-start=\"1772\" data-end=\"1775\"\u003e• Installation: Direct OEM replacement\u003cbr data-start=\"1813\" data-end=\"1816\"\u003e• Application: Semiconductor photolithography and wafer stage motion control systems \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"1cz0398\" data-start=\"1940\" data-end=\"1964\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-start=\"1966\" data-end=\"2127\" data-is-last-node=\"\" data-is-only-node=\"\"\u003e• Ultratech Stepper 0513-555000 Rev. A\u003cbr data-start=\"2004\" data-end=\"2007\"\u003e• Ultratech Stepper 0513-4197-00 Rev. 2\u003cbr data-start=\"2046\" data-end=\"2049\"\u003e• Semifusion Model 152 Stage Servo Board\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/section\u003e\n\u003c\/div\u003e","brand":"Ultratech","offers":[{"title":"Used Surplus - Excellent Condition","offer_id":51714362310958,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_5224560f-c76d-4f69-a135-cff23e6027c5.jpg?v=1770424108","url":"https:\/\/plgautomation.com\/products\/industrial-0513-4197-00-stage-servo-controller-board","provider":"PLG Automation ","version":"1.0","type":"link"}