{"product_id":"industrial-1002-324200-autoload-arm-wafer-handling-assembly","title":"Industrial 1002-324200 Autoload Arm Wafer Handling Assembly","description":"\u003cdiv class=\"\" data-turn-id-container=\"request-6a3be693-4000-83ec-acea-09e97e9e1ceb-65\" data-is-intersecting=\"true\"\u003e\n\u003csection class=\"text-token-text-primary w-full focus:outline-none has-data-writing-block:pointer-events-none [\u0026amp;:has([data-writing-block])\u0026gt;*]:pointer-events-auto R6Vx5W_threadScrollVars scroll-mb-[calc(var(--scroll-root-safe-area-inset-bottom,0px)+var(--thread-response-height))] scroll-mt-[calc(var(--header-height)+min(200px,max(70px,20svh)))]\" dir=\"auto\" data-turn-id=\"request-6a3be693-4000-83ec-acea-09e97e9e1ceb-65\" data-turn-id-container=\"request-6a3be693-4000-83ec-acea-09e97e9e1ceb-65\" data-testid=\"conversation-turn-727\" data-turn=\"assistant\"\u003e\n\u003cdiv class=\"text-base my-auto mx-auto pb-10 [--thread-content-margin:var(--thread-content-margin-xs,calc(var(--spacing)*4))] @w-sm\/main:[--thread-content-margin:var(--thread-content-margin-sm,calc(var(--spacing)*6))] @w-lg\/main:[--thread-content-margin:var(--thread-content-margin-lg,calc(var(--spacing)*16))] px-(--thread-content-margin)\"\u003e\n\u003cdiv data-conversation-screenshot-content=\"\" class=\"[--thread-content-max-width:40rem] @w-lg\/main:[--thread-content-max-width:48rem] mx-auto max-w-(--thread-content-max-width) flex-1 group\/turn-messages focus-visible:outline-hidden relative flex w-full min-w-0 flex-col agent-turn\"\u003e\n\u003cdiv class=\"flex max-w-full flex-col gap-4 grow\"\u003e\n\u003cdiv data-message-author-role=\"assistant\" data-message-id=\"eb460db8-6d09-4f3c-a2a6-a83f0e6b1348\" data-turn-start-message=\"true\" dir=\"auto\" data-message-model-slug=\"gpt-5-5\" class=\"min-h-8 text-message relative flex w-full flex-col items-end gap-2 text-start break-words whitespace-normal outline-none keyboard-focused:focus-ring [.text-message+\u0026amp;]:mt-1\" tabindex=\"0\"\u003e\n\u003cdiv class=\"flex w-full flex-col gap-1 empty:hidden\"\u003e\n\u003cdiv class=\"markdown prose dark:prose-invert wrap-break-word w-full dark markdown-new-styling\"\u003e\n\u003ch3 data-section-id=\"17lc1ru\" data-start=\"0\" data-end=\"16\"\u003eDescription:\u003c\/h3\u003e\n\u003cp data-start=\"17\" data-end=\"700\"\u003eThe Ultratech Stepper 1002-324200 Autoload Arm is a precision wafer handling assembly designed to automate wafer loading and unloading in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech 990, 1000, 1100, 1500, and 1700 wafer steppers, this assembly incorporates the 0513-470400 Lower Flat Finder Board to detect wafer orientation and ensure accurate positioning prior to transfer and exposure. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn autoloader components, preventive maintenance, and restoration of reliable automated wafer handling performance. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5ms9th\" data-start=\"702\" data-end=\"719\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-start=\"720\" data-end=\"1293\"\u003eThe Ultratech Stepper 1002-324200 Autoload Arm is commonly used in semiconductor wafer fabrication, MEMS manufacturing, and research facilities operating Ultratech wafer steppers equipped with Smart Autoloaders. The integrated 0513-470400 Lower Flat Finder PCB detects the wafer flat on 4-inch, 5-inch, and 6-inch wafers, enabling proper orientation and accurate transfer to the exposure stage. Compatibility should be verified using the original part number, board revision, and applicable Ultratech stepper model before installation. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5hg6bl\" data-start=\"1295\" data-end=\"1324\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-start=\"1325\" data-end=\"1896\"\u003e• Brand: Ultratech Stepper\u003cbr data-start=\"1351\" data-end=\"1354\"\u003e• Part Number: 1002-324200\u003cbr data-start=\"1380\" data-end=\"1383\"\u003e• Revision: Rev. D (application dependent)\u003cbr data-start=\"1425\" data-end=\"1428\"\u003e• Product Type: Autoload Arm Assembly\u003cbr data-start=\"1465\" data-end=\"1468\"\u003e• Integrated PCB: 0513-470400 Lower Flat Finder Board\u003cbr data-start=\"1521\" data-end=\"1524\"\u003e• Board Function: Wafer flat detection and orientation\u003cbr data-start=\"1578\" data-end=\"1581\"\u003e• Wafer Compatibility: 4 in., 5 in., and 6 in. wafers\u003cbr data-start=\"1634\" data-end=\"1637\"\u003e• Autoloader Type: Smart Autoloader\u003cbr data-start=\"1672\" data-end=\"1675\"\u003e• Function: Automated wafer loading and positioning\u003cbr data-start=\"1726\" data-end=\"1729\"\u003e• Compatible Equipment: Ultratech 990, 1000, 1100, 1500, and 1700 Wafer Stepper Systems\u003cbr data-start=\"1816\" data-end=\"1819\"\u003e• Installation: Direct OEM replacement \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"1cz0398\" data-start=\"1898\" data-end=\"1922\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-start=\"1924\" data-end=\"2047\" data-is-last-node=\"\" data-is-only-node=\"\"\u003e• Ultratech Stepper 1002-373700\u003cbr data-start=\"1955\" data-end=\"1958\"\u003e• Ultratech Stepper 1002-346300\u003cbr data-start=\"1989\" data-end=\"1992\"\u003e• Ultratech Stepper 0513-470400\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/section\u003e\n\u003c\/div\u003e","brand":"Ultratech","offers":[{"title":"Used Surplus - Excellent Condition","offer_id":51714361852206,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_950dc501-bd26-486d-8e00-60e5b4861e05.jpg?v=1770424092","url":"https:\/\/plgautomation.com\/products\/industrial-1002-324200-autoload-arm-wafer-handling-assembly","provider":"PLG Automation ","version":"1.0","type":"link"}