{"product_id":"industrial-fc-d980c-da-kn069-sb-mass-flow-controller","title":"Industrial FC-D980C-DA-KN069-SB Mass Flow Controller","description":"\u003cdiv\u003e\u003cp\u003eIndustrial FC-D980C-DA-KN069-SB Mass Flow Controller from Advanced Energy's Aera line is a digital, closed-loop gas-flow controller designed for precise delivery of ultra-small to mid-range gas flows in semiconductor equipment and related laboratory systems. The FC-D980C family covers a broad range—from 10 SCCM up to 5 SLM—and implements a normally closed output path for reliable shutoff when not commanded. Documented observations and marketplace listings show FC-D980C variants used with gases such as helium (around 200 SCCM), CHF3, SF6, and SiH4 in process and research settings. Manufactured under the Advanced Energy Aera brand, the FC-D980C is cited in semiconductor equipment literature as a high-precision gas-flow controller used to regulate propellant and process-gas deliveries.\u003c\/p\u003e\u003c\/div\u003e","brand":"AERA","offers":[{"title":"New","offer_id":51657050685742,"sku":null,"price":435.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_ce287cff-fe2d-4d1d-b449-c58016c9b41e.jpg?v=1769465567","url":"https:\/\/plgautomation.com\/products\/industrial-fc-d980c-da-kn069-sb-mass-flow-controller","provider":"PLG Automation ","version":"1.0","type":"link"}