{"product_id":"tylan-corp-fc-260-2-slpm-02-mass-flow-controller","title":"Tylan Corp. FC-260-2-SLPM-02 Mass Flow Controller","description":"\u003cdiv class=\"\" data-turn-id-container=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-20\" data-is-intersecting=\"true\"\u003e\n\u003csection class=\"text-token-text-primary w-full focus:outline-none has-data-writing-block:pointer-events-none [\u0026amp;:has([data-writing-block])\u0026gt;*]:pointer-events-auto R6Vx5W_threadScrollVars scroll-mb-[calc(var(--scroll-root-safe-area-inset-bottom,0px)+var(--thread-response-height))] scroll-mt-[calc(var(--header-height)+min(200px,max(70px,20svh)))]\" dir=\"auto\" data-turn-id=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-20\" data-turn-id-container=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-20\" data-testid=\"conversation-turn-672\" data-turn=\"assistant\"\u003e\n\u003cdiv class=\"text-base my-auto mx-auto pb-10 [--thread-content-margin:var(--thread-content-margin-xs,calc(var(--spacing)*4))] @w-sm\/main:[--thread-content-margin:var(--thread-content-margin-sm,calc(var(--spacing)*6))] @w-lg\/main:[--thread-content-margin:var(--thread-content-margin-lg,calc(var(--spacing)*16))] px-(--thread-content-margin)\"\u003e\n\u003cdiv data-conversation-screenshot-content=\"\" class=\"[--thread-content-max-width:40rem] @w-lg\/main:[--thread-content-max-width:48rem] mx-auto max-w-(--thread-content-max-width) flex-1 group\/turn-messages focus-visible:outline-hidden relative flex w-full min-w-0 flex-col agent-turn\"\u003e\n\u003cdiv class=\"flex max-w-full flex-col gap-4 grow\"\u003e\n\u003cdiv data-message-author-role=\"assistant\" data-message-id=\"dbd090e6-56d1-4f57-bdcb-e077bc1fbe50\" data-turn-start-message=\"true\" dir=\"auto\" data-message-model-slug=\"gpt-5-5\" class=\"min-h-8 text-message relative flex w-full flex-col items-end gap-2 text-start break-words whitespace-normal outline-none keyboard-focused:focus-ring [.text-message+\u0026amp;]:mt-1\" tabindex=\"0\"\u003e\n\u003cdiv class=\"flex w-full flex-col gap-1 empty:hidden\"\u003e\n\u003cdiv class=\"markdown prose dark:prose-invert wrap-break-word w-full dark markdown-new-styling\"\u003e\n\u003ch3 data-section-id=\"17lc1ru\" data-start=\"0\" data-end=\"16\"\u003eDescription:\u003c\/h3\u003e\n\u003cp data-start=\"17\" data-end=\"880\"\u003eThe Tylan Corp. FC-260-2-SLPM-02 Mass Flow Controller is a precision thermal mass flow controller designed to accurately measure and regulate gas flow in semiconductor, laboratory, and industrial process applications. Commonly installed in semiconductor manufacturing equipment, gas delivery systems, analytical instruments, vacuum processing equipment, and research laboratories requiring a controlled flow rate of 2 SLPM. Maintenance technicians, process engineers, and \u003ca href=\"https:\/\/plgautomation.com\/collections\/hmi-operator-interfaces\"\u003esystem integrators\u003c\/a\u003e use this mass flow controller for equipment repair, process monitoring, calibration, and replacement of worn OEM flow controllers to maintain precise and repeatable gas delivery. The FC-260 series is rated for a maximum operating pressure of 150 PSIG and utilizes a solid-state control valve with a Type 316 stainless steel flow path. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5ms9th\" data-start=\"882\" data-end=\"899\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-start=\"900\" data-end=\"1450\"\u003eThe Tylan Corp. FC-260-2-SLPM-02 Mass Flow Controller is commonly used in semiconductor fabrication, chemical vapor deposition (CVD), plasma etching, gas blending systems, vacuum coating equipment, analytical laboratories, pharmaceutical manufacturing, and industrial process control. Its thermal mass flow sensing technology provides accurate, pressure- and temperature-compensated gas flow control, making it ideal for critical applications requiring high repeatability, fast response, and long-term stability. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5hg6bl\" data-start=\"1452\" data-end=\"1481\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-start=\"1482\" data-end=\"2138\"\u003e• Brand: Tylan Corp. (Millipore)\u003cbr data-start=\"1514\" data-end=\"1517\"\u003e• Model: FC-260-2-SLPM-02\u003cbr data-start=\"1542\" data-end=\"1545\"\u003e• Series: FC-260\u003cbr data-start=\"1561\" data-end=\"1564\"\u003e• Product Type: Thermal Mass Flow Controller\u003cbr data-start=\"1608\" data-end=\"1611\"\u003e• Flow Capacity: 2 SLPM (Standard Liters per Minute)\u003cbr data-start=\"1663\" data-end=\"1666\"\u003e• Maximum Operating Pressure: 150 PSIG\u003cbr data-start=\"1704\" data-end=\"1707\"\u003e• Measurement Principle: Thermal Mass Flow\u003cbr data-start=\"1749\" data-end=\"1752\"\u003e• Control Valve: Integrated Solid-State Valve Assembly\u003cbr data-start=\"1806\" data-end=\"1809\"\u003e• Wetted Materials: Type 316 Stainless Steel\u003cbr data-start=\"1853\" data-end=\"1856\"\u003e• Seal Type: Elastomer-Sealed\u003cbr data-start=\"1885\" data-end=\"1888\"\u003e• Mounting: Multi-Position (Attitude Insensitive)\u003cbr data-start=\"1937\" data-end=\"1940\"\u003e• Electrical Output: Analog Output (configuration dependent)\u003cbr data-start=\"2000\" data-end=\"2003\"\u003e• Application: Semiconductor Gas Delivery, Laboratory Gas Control, and Industrial Process Systems \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"1cz0398\" data-start=\"2140\" data-end=\"2164\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-start=\"2165\" data-end=\"2365\" data-is-last-node=\"\" data-is-only-node=\"\"\u003e• Brooks 5850E Series 2 SLPM Mass Flow Controller\u003cbr data-start=\"2214\" data-end=\"2217\"\u003e• MKS Instruments 1179A 2 SLPM Mass Flow Controller\u003cbr data-start=\"2268\" data-end=\"2271\"\u003e• Parker Veriflo Series II Standard Mass Flow Controller\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/section\u003e\n\u003c\/div\u003e","brand":"TYLAN","offers":[{"title":"Used Surplus - Excellent Condition","offer_id":51714350154030,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_5684d6cd-e687-40e1-b887-968dc2a2fcfd.jpg?v=1770423707","url":"https:\/\/plgautomation.com\/products\/tylan-corp-fc-260-2-slpm-02-mass-flow-controller","provider":"PLG Automation ","version":"1.0","type":"link"}