{"product_id":"tylan-corporation-fc-261-10slpm-b-02-mass-flow-controller","title":"Tylan Corporation FC-261-10SLPM-B-02 Mass Flow Controller","description":"\u003cdiv class=\"\" data-turn-id-container=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-21\" data-is-intersecting=\"true\"\u003e\n\u003csection class=\"text-token-text-primary w-full focus:outline-none has-data-writing-block:pointer-events-none [\u0026amp;:has([data-writing-block])\u0026gt;*]:pointer-events-auto R6Vx5W_threadScrollVars scroll-mb-[calc(var(--scroll-root-safe-area-inset-bottom,0px)+var(--thread-response-height))] scroll-mt-[calc(var(--header-height)+min(200px,max(70px,20svh)))]\" dir=\"auto\" data-turn-id=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-21\" data-turn-id-container=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-21\" data-testid=\"conversation-turn-674\" data-turn=\"assistant\"\u003e\n\u003cdiv class=\"text-base my-auto mx-auto pb-10 [--thread-content-margin:var(--thread-content-margin-xs,calc(var(--spacing)*4))] @w-sm\/main:[--thread-content-margin:var(--thread-content-margin-sm,calc(var(--spacing)*6))] @w-lg\/main:[--thread-content-margin:var(--thread-content-margin-lg,calc(var(--spacing)*16))] px-(--thread-content-margin)\"\u003e\n\u003cdiv data-conversation-screenshot-content=\"\" class=\"[--thread-content-max-width:40rem] @w-lg\/main:[--thread-content-max-width:48rem] mx-auto max-w-(--thread-content-max-width) flex-1 group\/turn-messages focus-visible:outline-hidden relative flex w-full min-w-0 flex-col agent-turn\"\u003e\n\u003cdiv class=\"flex max-w-full flex-col gap-4 grow\"\u003e\n\u003cdiv data-message-author-role=\"assistant\" data-message-id=\"5f589827-e5ff-4b55-904d-86d79c17ef3f\" data-turn-start-message=\"true\" dir=\"auto\" data-message-model-slug=\"gpt-5-5\" class=\"min-h-8 text-message relative flex w-full flex-col items-end gap-2 text-start break-words whitespace-normal outline-none keyboard-focused:focus-ring [.text-message+\u0026amp;]:mt-1\" tabindex=\"0\"\u003e\n\u003cdiv class=\"flex w-full flex-col gap-1 empty:hidden\"\u003e\n\u003cdiv class=\"markdown prose dark:prose-invert wrap-break-word w-full dark markdown-new-styling\"\u003e\n\u003ch3 data-section-id=\"17lc1ru\" data-start=\"0\" data-end=\"16\"\u003eDescription:\u003c\/h3\u003e\n\u003cp data-start=\"17\" data-end=\"891\"\u003eThe Tylan Corp. FC-261-10SLPM-B-02 Mass Flow Controller is a precision thermal mass flow controller designed to accurately measure and regulate gas flow in semiconductor manufacturing, laboratory, and industrial process applications. Commonly installed in gas delivery panels, vacuum systems, chemical vapor deposition (CVD) equipment, analytical instruments, and research laboratories requiring a full-scale flow rate of 10 SLPM. Maintenance technicians, process engineers, and \u003ca href=\"https:\/\/plgautomation.com\/collections\/hmi-operator-interfaces\"\u003esystem integrators\u003c\/a\u003e use this controller for equipment repair, calibration, process optimization, and replacement of worn OEM mass flow controllers to ensure precise and repeatable gas flow. The FC-261 series is rated for a maximum operating pressure of 150 PSIG and utilizes a Type 316 stainless steel flow path with an integrated proportional control valve. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5ms9th\" data-start=\"893\" data-end=\"910\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-start=\"911\" data-end=\"1420\"\u003eThe Tylan Corp. FC-261-10SLPM-B-02 Mass Flow Controller is commonly used in semiconductor fabrication, plasma etching systems, CVD and PVD equipment, gas mixing systems, environmental testing equipment, pharmaceutical manufacturing, and industrial process control. Its thermal mass flow sensing technology provides accurate gas flow measurement and closed-loop control independent of pressure and temperature variations, making it ideal for critical process applications. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5hg6bl\" data-start=\"1422\" data-end=\"1451\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-start=\"1452\" data-end=\"2095\"\u003e• Brand: Tylan Corp. (Millipore)\u003cbr data-start=\"1484\" data-end=\"1487\"\u003e• Model: FC-261-10SLPM-B-02\u003cbr data-start=\"1514\" data-end=\"1517\"\u003e• Series: FC-261\u003cbr data-start=\"1533\" data-end=\"1536\"\u003e• Product Type: Thermal Mass Flow Controller\u003cbr data-start=\"1580\" data-end=\"1583\"\u003e• Full Scale Flow Rate: 10 SLPM (Standard Liters per Minute)\u003cbr data-start=\"1643\" data-end=\"1646\"\u003e• Maximum Operating Pressure: 150 PSIG\u003cbr data-start=\"1684\" data-end=\"1687\"\u003e• Measurement Principle: Thermal Mass Flow\u003cbr data-start=\"1729\" data-end=\"1732\"\u003e• Control Valve: Integrated Proportional Solenoid Valve\u003cbr data-start=\"1787\" data-end=\"1790\"\u003e• Wetted Materials: Type 316 Stainless Steel\u003cbr data-start=\"1834\" data-end=\"1837\"\u003e• Electrical Connector: Amphenol 583718-1 A-MP\u003cbr data-start=\"1883\" data-end=\"1886\"\u003e• Identification Number: 7728\u003cbr data-start=\"1915\" data-end=\"1918\"\u003e• Mounting: Multi-Position Installation\u003cbr data-start=\"1957\" data-end=\"1960\"\u003e• Application: Semiconductor Gas Delivery, Laboratory Gas Control, and Industrial Process Systems \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"1cz0398\" data-start=\"2097\" data-end=\"2121\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-start=\"2122\" data-end=\"2315\" data-is-last-node=\"\" data-is-only-node=\"\"\u003e• Brooks 5850E Series 10 SLPM Mass Flow Controller\u003cbr data-start=\"2172\" data-end=\"2175\"\u003e• MKS Instruments 1179A 10 SLPM Mass Flow Controller\u003cbr data-start=\"2227\" data-end=\"2230\"\u003e• Alicat MC Series 10 SLPM Mass Flow Controller\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/section\u003e\n\u003c\/div\u003e","brand":"TYLAN","offers":[{"title":"Used Surplus - Excellent Condition","offer_id":51714350121262,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_a0cab34b-da3f-4bd0-bb90-fba2c2847e10.jpg?v=1770423706","url":"https:\/\/plgautomation.com\/products\/tylan-corporation-fc-261-10slpm-b-02-mass-flow-controller","provider":"PLG Automation ","version":"1.0","type":"link"}