{"product_id":"tylan-fc-260-150scccm-sih4-usnp-mass-flow-controller","title":"Tylan FC-260-150SCCCM-SIH4-USNP Mass Flow Controller","description":"\u003cdiv class=\"\" data-turn-id-container=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-24\" data-is-intersecting=\"true\"\u003e\n\u003csection class=\"text-token-text-primary w-full focus:outline-none has-data-writing-block:pointer-events-none [\u0026amp;:has([data-writing-block])\u0026gt;*]:pointer-events-auto R6Vx5W_threadScrollVars scroll-mb-[calc(var(--scroll-root-safe-area-inset-bottom,0px)+var(--thread-response-height))] scroll-mt-[calc(var(--header-height)+min(200px,max(70px,20svh)))]\" dir=\"auto\" data-turn-id=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-24\" data-turn-id-container=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-24\" data-testid=\"conversation-turn-680\" data-turn=\"assistant\"\u003e\n\u003cdiv class=\"text-base my-auto mx-auto pb-10 [--thread-content-margin:var(--thread-content-margin-xs,calc(var(--spacing)*4))] @w-sm\/main:[--thread-content-margin:var(--thread-content-margin-sm,calc(var(--spacing)*6))] @w-lg\/main:[--thread-content-margin:var(--thread-content-margin-lg,calc(var(--spacing)*16))] px-(--thread-content-margin)\"\u003e\n\u003cdiv data-conversation-screenshot-content=\"\" class=\"[--thread-content-max-width:40rem] @w-lg\/main:[--thread-content-max-width:48rem] mx-auto max-w-(--thread-content-max-width) flex-1 group\/turn-messages focus-visible:outline-hidden relative flex w-full min-w-0 flex-col agent-turn\"\u003e\n\u003cdiv class=\"flex max-w-full flex-col gap-4 grow\"\u003e\n\u003cdiv data-message-author-role=\"assistant\" data-message-id=\"588edfaa-c4c5-477e-86b9-8b0f137a6f59\" data-turn-start-message=\"true\" dir=\"auto\" data-message-model-slug=\"gpt-5-5\" class=\"min-h-8 text-message relative flex w-full flex-col items-end gap-2 text-start break-words whitespace-normal outline-none keyboard-focused:focus-ring [.text-message+\u0026amp;]:mt-1\" tabindex=\"0\"\u003e\n\u003cdiv class=\"flex w-full flex-col gap-1 empty:hidden\"\u003e\n\u003cdiv class=\"markdown prose dark:prose-invert wrap-break-word w-full dark markdown-new-styling\"\u003e\n\u003ch3 data-section-id=\"17lc1ru\" data-start=\"0\" data-end=\"16\"\u003eDescription:\u003c\/h3\u003e\n\u003cp data-start=\"17\" data-end=\"895\"\u003eThe Tylan FC-260 Mass Flow Controller is a precision thermal mass flow controller designed to accurately measure and regulate silane (SiH₄) gas flow in semiconductor manufacturing and industrial gas delivery systems. Commonly installed in chemical vapor deposition (CVD) equipment, plasma etching systems, gas cabinets, vacuum process equipment, and research laboratories requiring a full-scale flow capacity of 150 SCCM. Maintenance technicians, process engineers, and \u003ca href=\"https:\/\/plgautomation.com\/collections\/hmi-operator-interfaces\"\u003esystem integrators\u003c\/a\u003e use this controller for equipment repair, calibration, process optimization, and replacement of worn OEM mass flow controllers to ensure precise and repeatable gas delivery. The FC-260 Series features a maximum operating pressure of 150 PSIG and a Type 316 stainless steel wetted flow path for compatibility with high-purity and reactive gases. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5ms9th\" data-start=\"897\" data-end=\"914\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-start=\"915\" data-end=\"1403\"\u003eThe Tylan FC-260 Mass Flow Controller is commonly used in semiconductor wafer fabrication, CVD and plasma processing systems, gas blending panels, analytical instrumentation, photovoltaic manufacturing, and laboratory gas handling systems. Calibrated for silane (SiH₄), it provides accurate closed-loop mass flow control independent of pressure and temperature variations, making it suitable for critical high-purity gas delivery applications. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5hg6bl\" data-start=\"1405\" data-end=\"1434\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-start=\"1435\" data-end=\"2122\"\u003e• Brand: Tylan General (Millipore)\u003cbr data-start=\"1469\" data-end=\"1472\"\u003e• Model: FC-260\u003cbr data-start=\"1487\" data-end=\"1490\"\u003e• Series: 260 Series\u003cbr data-start=\"1510\" data-end=\"1513\"\u003e• Product Type: Thermal Mass Flow Controller\u003cbr data-start=\"1557\" data-end=\"1560\"\u003e• Gas Calibration: Silane (SiH₄)\u003cbr data-start=\"1592\" data-end=\"1595\"\u003e• Full Scale Flow Rate: 150 SCCM\u003cbr data-start=\"1627\" data-end=\"1630\"\u003e• Maximum Operating Pressure: 150 PSIG\u003cbr data-start=\"1668\" data-end=\"1671\"\u003e• Measurement Principle: Thermal Mass Flow\u003cbr data-start=\"1713\" data-end=\"1716\"\u003e• Control Range: 50:1 (100% to 2% Full Scale)\u003cbr data-start=\"1761\" data-end=\"1764\"\u003e• Accuracy: ±1% Full Scale\u003cbr data-start=\"1790\" data-end=\"1793\"\u003e• Repeatability: ±0.2% Full Scale\u003cbr data-start=\"1826\" data-end=\"1829\"\u003e• Wetted Materials: Type 316 Stainless Steel\u003cbr data-start=\"1873\" data-end=\"1876\"\u003e• Seal Material: Viton®, Kalrez®, or Neoprene (gas application dependent)\u003cbr data-start=\"1949\" data-end=\"1952\"\u003e• Output Signal: 0–5 VDC Analog\u003cbr data-start=\"1983\" data-end=\"1986\"\u003e• Power Supply: ±15 VDC\u003cbr data-start=\"2009\" data-end=\"2012\"\u003e• Application: Semiconductor Gas Delivery and Industrial Process Control \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"1cz0398\" data-start=\"2124\" data-end=\"2148\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-start=\"2149\" data-end=\"2356\" data-is-last-node=\"\" data-is-only-node=\"\"\u003e• Brooks 5850E Series 150 SCCM Mass Flow Controller\u003cbr data-start=\"2200\" data-end=\"2203\"\u003e• MKS Instruments 1179A 150 SCCM Mass Flow Controller\u003cbr data-start=\"2256\" data-end=\"2259\"\u003e• Horiba STEC SEC-4400 Series 150 SCCM Mass Flow Controller\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/section\u003e\n\u003c\/div\u003e","brand":"Tylan","offers":[{"title":"Used Surplus - Excellent Condition","offer_id":51714350055726,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_87490c2b-6155-455e-9355-c3ce81701475.jpg?v=1770423704","url":"https:\/\/plgautomation.com\/products\/tylan-fc-260-150scccm-sih4-usnp-mass-flow-controller","provider":"PLG Automation ","version":"1.0","type":"link"}