{"product_id":"tylan-fc-261-7slpm-o2-150psig-usnp-mass-flow-controller","title":"Tylan FC-261-7SLPM-O2-150PSIG-USNP Mass Flow Controller","description":"\u003cdiv class=\"\" data-turn-id-container=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-25\" data-is-intersecting=\"true\"\u003e\n\u003csection class=\"text-token-text-primary w-full focus:outline-none has-data-writing-block:pointer-events-none [\u0026amp;:has([data-writing-block])\u0026gt;*]:pointer-events-auto R6Vx5W_threadScrollVars scroll-mb-[calc(var(--scroll-root-safe-area-inset-bottom,0px)+var(--thread-response-height))] scroll-mt-[calc(var(--header-height)+min(200px,max(70px,20svh)))]\" dir=\"auto\" data-turn-id=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-25\" data-turn-id-container=\"request-6a43a35d-6f44-83ec-bb05-598fd82bfd75-25\" data-testid=\"conversation-turn-682\" data-turn=\"assistant\"\u003e\n\u003cdiv class=\"text-base my-auto mx-auto pb-10 [--thread-content-margin:var(--thread-content-margin-xs,calc(var(--spacing)*4))] @w-sm\/main:[--thread-content-margin:var(--thread-content-margin-sm,calc(var(--spacing)*6))] @w-lg\/main:[--thread-content-margin:var(--thread-content-margin-lg,calc(var(--spacing)*16))] px-(--thread-content-margin)\"\u003e\n\u003cdiv data-conversation-screenshot-content=\"\" class=\"[--thread-content-max-width:40rem] @w-lg\/main:[--thread-content-max-width:48rem] mx-auto max-w-(--thread-content-max-width) flex-1 group\/turn-messages focus-visible:outline-hidden relative flex w-full min-w-0 flex-col agent-turn\"\u003e\n\u003cdiv class=\"flex max-w-full flex-col gap-4 grow\"\u003e\n\u003cdiv data-message-author-role=\"assistant\" data-message-id=\"cb051789-6324-49d7-8434-595954e50c4b\" data-turn-start-message=\"true\" dir=\"auto\" data-message-model-slug=\"gpt-5-5\" class=\"min-h-8 text-message relative flex w-full flex-col items-end gap-2 text-start break-words whitespace-normal outline-none keyboard-focused:focus-ring [.text-message+\u0026amp;]:mt-1\" tabindex=\"0\"\u003e\n\u003cdiv class=\"flex w-full flex-col gap-1 empty:hidden\"\u003e\n\u003cdiv class=\"markdown prose dark:prose-invert wrap-break-word w-full dark markdown-new-styling\"\u003e\n\u003ch3 data-section-id=\"17lc1ru\" data-start=\"0\" data-end=\"16\"\u003eDescription:\u003c\/h3\u003e\n\u003cp data-start=\"17\" data-end=\"875\"\u003eThe Tylan FC-261 Mass Flow Controller is a precision thermal mass flow controller designed to accurately measure and regulate oxygen (O₂) gas flow in semiconductor manufacturing, laboratory, and industrial process applications. Commonly installed in gas delivery panels, semiconductor process equipment, analytical instruments, vacuum systems, and research laboratories requiring a full-scale flow rate of 7 SLPM. Maintenance technicians, process engineers, and \u003ca href=\"https:\/\/plgautomation.com\/collections\/hmi-operator-interfaces\"\u003esystem integrators\u003c\/a\u003e use this controller for equipment repair, calibration, process optimization, and replacement of worn OEM mass flow controllers to ensure precise, repeatable gas flow control. The FC-261 Series is rated for a maximum operating pressure of 150 PSIG and features a Type 316 stainless steel flow path compatible with high-purity process gases. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5ms9th\" data-start=\"877\" data-end=\"894\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-start=\"895\" data-end=\"1409\"\u003eThe Tylan FC-261 Mass Flow Controller is commonly used in semiconductor wafer fabrication, gas blending systems, chemical vapor deposition (CVD), plasma etching equipment, analytical laboratories, photovoltaic manufacturing, and industrial process control. Calibrated for oxygen (O₂), it provides closed-loop thermal mass flow control independent of pressure and temperature variations, making it ideal for applications requiring accurate gas delivery and long-term stability. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5hg6bl\" data-start=\"1411\" data-end=\"1440\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-start=\"1441\" data-end=\"2145\"\u003e• Brand: Tylan General (Millipore)\u003cbr data-start=\"1475\" data-end=\"1478\"\u003e• Model: FC-261\u003cbr data-start=\"1493\" data-end=\"1496\"\u003e• Series: 260 Series\u003cbr data-start=\"1516\" data-end=\"1519\"\u003e• Product Type: Thermal Mass Flow Controller\u003cbr data-start=\"1563\" data-end=\"1566\"\u003e• Gas Calibration: Oxygen (O₂)\u003cbr data-start=\"1596\" data-end=\"1599\"\u003e• Full Scale Flow Rate: 7 SLPM\u003cbr data-start=\"1629\" data-end=\"1632\"\u003e• Maximum Operating Pressure: 150 PSIG\u003cbr data-start=\"1670\" data-end=\"1673\"\u003e• Measurement Principle: Thermal Mass Flow\u003cbr data-start=\"1715\" data-end=\"1718\"\u003e• Control Range: 50:1 (100% to 2% Full Scale)\u003cbr data-start=\"1763\" data-end=\"1766\"\u003e• Accuracy: ±1% Full Scale\u003cbr data-start=\"1792\" data-end=\"1795\"\u003e• Repeatability: ±0.2% Full Scale\u003cbr data-start=\"1828\" data-end=\"1831\"\u003e• Wetted Materials: Type 316 Stainless Steel\u003cbr data-start=\"1875\" data-end=\"1878\"\u003e• Seal Material: Viton®, Kalrez®, or Neoprene (application dependent)\u003cbr data-start=\"1947\" data-end=\"1950\"\u003e• Output Signal: 0–5 VDC Analog\u003cbr data-start=\"1981\" data-end=\"1984\"\u003e• Power Supply: ±15 VDC\u003cbr data-start=\"2007\" data-end=\"2010\"\u003e• Application: Semiconductor Gas Delivery, Laboratory Gas Control, and Industrial Process Systems \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"1cz0398\" data-start=\"2147\" data-end=\"2171\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-start=\"2172\" data-end=\"2373\" data-is-last-node=\"\" data-is-only-node=\"\"\u003e• Brooks 5850E Series 7 SLPM Mass Flow Controller\u003cbr data-start=\"2221\" data-end=\"2224\"\u003e• MKS Instruments 1179A 7 SLPM Mass Flow Controller\u003cbr data-start=\"2275\" data-end=\"2278\"\u003e• Horiba STEC SEC-4400 Series 7 SLPM Mass Flow Controller\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/section\u003e\n\u003c\/div\u003e","brand":"Tylan","offers":[{"title":"Used Surplus - Excellent Condition","offer_id":51714350022958,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_b448583f-ea58-4146-9b17-16b4c9bb0ee5.jpg?v=1770423703","url":"https:\/\/plgautomation.com\/products\/tylan-fc-261-7slpm-o2-150psig-usnp-mass-flow-controller","provider":"PLG Automation ","version":"1.0","type":"link"}