{"product_id":"tylan-fc-2960mep5-mass-flow-controller-2960-series-3slmp-n2","title":"TYLAN FC-2960MEP5 MASS FLOW CONTROLLER 2960 SERIES 3SLMP N2","description":"\u003cdiv data-is-intersecting=\"true\" data-turn-id-container=\"request-6a467d74-de54-83ec-be15-35156863671e-2\" class=\"\"\u003e\n\u003csection data-turn=\"assistant\" data-testid=\"conversation-turn-38\" data-turn-id-container=\"request-6a467d74-de54-83ec-be15-35156863671e-2\" data-turn-id=\"request-6a467d74-de54-83ec-be15-35156863671e-2\" dir=\"auto\" class=\"text-token-text-primary w-full focus:outline-none has-data-writing-block:pointer-events-none [\u0026amp;:has([data-writing-block])\u0026gt;*]:pointer-events-auto R6Vx5W_threadScrollVars scroll-mb-[calc(var(--scroll-root-safe-area-inset-bottom,0px)+var(--thread-response-height))] scroll-mt-[calc(var(--header-height)+min(200px,max(70px,20svh)))]\"\u003e\n\u003cdiv class=\"text-base my-auto mx-auto pb-10 [--thread-content-margin:var(--thread-content-margin-xs,calc(var(--spacing)*4))] @w-sm\/main:[--thread-content-margin:var(--thread-content-margin-sm,calc(var(--spacing)*6))] @w-lg\/main:[--thread-content-margin:var(--thread-content-margin-lg,calc(var(--spacing)*16))] px-(--thread-content-margin)\"\u003e\n\u003cdiv class=\"[--thread-content-max-width:40rem] @w-lg\/main:[--thread-content-max-width:48rem] mx-auto max-w-(--thread-content-max-width) flex-1 group\/turn-messages focus-visible:outline-hidden relative flex w-full min-w-0 flex-col agent-turn\" data-conversation-screenshot-content=\"\"\u003e\n\u003cdiv class=\"flex max-w-full flex-col gap-4 grow\"\u003e\n\u003cdiv class=\"min-h-8 text-message relative flex w-full flex-col items-end gap-2 text-start break-words whitespace-normal outline-none keyboard-focused:focus-ring [.text-message+\u0026amp;]:mt-1\" data-message-model-slug=\"gpt-5-5\" dir=\"auto\" data-turn-start-message=\"true\" data-message-id=\"01bad50f-820d-4ac8-9c40-4c84c4984029\" data-message-author-role=\"assistant\" tabindex=\"0\"\u003e\n\u003cdiv class=\"flex w-full flex-col gap-1 empty:hidden\"\u003e\n\u003cdiv class=\"markdown prose dark:prose-invert wrap-break-word w-full dark markdown-new-styling\"\u003e\n\u003ch3 data-end=\"16\" data-start=\"0\" data-section-id=\"17lc1ru\"\u003eDescription:\u003c\/h3\u003e\n\u003cp data-end=\"602\" data-start=\"18\"\u003eThe TYLAN FC-2960MEP5 Mass Flow Controller 2960 Series 3 SLPM N2 is used in precision gas flow control systems for semiconductor manufacturing, laboratory instrumentation, and industrial process automation. Commonly installed in semiconductor processing equipment, gas delivery systems, vacuum process tools, analytical instruments, and research laboratories requiring accurate nitrogen gas flow regulation. Maintenance teams and \u003ca href=\"https:\/\/plgautomation.com\/collections\/hmi-operator-interfaces\"\u003esystem integrators\u003c\/a\u003e use this mass flow controller for repair, retrofit, replacement, and process automation upgrades. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"621\" data-start=\"604\" data-section-id=\"5ms9th\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-end=\"1089\" data-start=\"623\"\u003eThe TYLAN FC-2960MEP5 Mass Flow Controller 2960 Series is designed to accurately measure and regulate nitrogen gas flow in high-purity process applications. It is widely used in semiconductor fabrication, chemical vapor deposition (CVD) systems, vacuum coating equipment, gas blending panels, analytical instrumentation, pharmaceutical manufacturing, and laboratory environments where precise nitrogen flow control is essential. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"1120\" data-start=\"1091\" data-section-id=\"5hg6bl\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-end=\"1974\" data-start=\"1122\"\u003e• Manufacturer: TYLAN General (Millipore)\u003cbr data-end=\"1166\" data-start=\"1163\"\u003e• Part Number: FC-2960MEP5\u003cbr data-end=\"1195\" data-start=\"1192\"\u003e• Product Type: Mass Flow Controller\u003cbr data-end=\"1234\" data-start=\"1231\"\u003e• Function: Precision Gas Flow Measurement and Control\u003cbr data-end=\"1291\" data-start=\"1288\"\u003e• Application: Semiconductor Processing, Laboratory, and Industrial Gas Delivery Systems\u003cbr data-end=\"1382\" data-start=\"1379\"\u003e• Compatible Equipment: TYLAN 2960 Series Gas Control Systems and Semiconductor Process Equipment\u003cbr data-end=\"1482\" data-start=\"1479\"\u003e• Series: 2960 Series\u003cbr data-end=\"1506\" data-start=\"1503\"\u003e• Flow Capacity: 3 SLPM\u003cbr data-end=\"1532\" data-start=\"1529\"\u003e• Calibration Gas: Nitrogen (N₂)\u003cbr data-end=\"1567\" data-start=\"1564\"\u003e• Control Type: Closed-Loop Electronic Mass Flow Control\u003cbr data-end=\"1626\" data-start=\"1623\"\u003e• Input\/Output Signal: 0–5 VDC (Model Dependent)\u003cbr data-end=\"1677\" data-start=\"1674\"\u003e• Power Supply: ±15 VDC Nominal\u003cbr data-end=\"1711\" data-start=\"1708\"\u003e• Connector Type: 4 VCR (1\/4 in.)\u003cbr data-end=\"1747\" data-start=\"1744\"\u003e• Interface: Card Edge\u003cbr data-end=\"1772\" data-start=\"1769\"\u003e• Mounting Type: Inline Process Installation\u003cbr data-end=\"1819\" data-start=\"1816\"\u003e• Industrial Duty Construction\u003cbr data-end=\"1852\" data-start=\"1849\"\u003e• Designed for Continuous Service Operation\u003cbr data-end=\"1898\" data-start=\"1895\"\u003e• OEM Replacement Mass Flow Controller \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"2000\" data-start=\"1976\" data-section-id=\"1cz0398\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-is-only-node=\"\" data-is-last-node=\"\" data-end=\"2159\" data-start=\"2002\"\u003e• TYLAN FC-2960MEP5 1 SLPM N2 Mass Flow Controller\u003cbr data-end=\"2055\" data-start=\"2052\"\u003e• TYLAN FC-2960MEP5 2 SLPM N2 Mass Flow Controller\u003cbr data-end=\"2108\" data-start=\"2105\"\u003e• TYLAN FC-2960MEP5 20 SLPM N2 Mass Flow Controller\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/section\u003e\n\u003c\/div\u003e","brand":"Tylan","offers":[{"title":"Used Surplus - Excellent Condition","offer_id":51714349891886,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_f230251c-cd7e-47d4-a8ec-8bc9a44ed946.jpg?v=1770423698","url":"https:\/\/plgautomation.com\/products\/tylan-fc-2960mep5-mass-flow-controller-2960-series-3slmp-n2","provider":"PLG Automation ","version":"1.0","type":"link"}