{"product_id":"ultratech-1064-701065-theta-wafer-fixture-assembly","title":"Ultratech 1064-701065 Theta Wafer Fixture Assembly","description":"\u003cdiv class=\"\" data-turn-id-container=\"request-6a3be693-4000-83ec-acea-09e97e9e1ceb-75\" data-is-intersecting=\"true\"\u003e\n\u003csection class=\"text-token-text-primary w-full focus:outline-none has-data-writing-block:pointer-events-none [\u0026amp;:has([data-writing-block])\u0026gt;*]:pointer-events-auto R6Vx5W_threadScrollVars scroll-mb-[calc(var(--scroll-root-safe-area-inset-bottom,0px)+var(--thread-response-height))] scroll-mt-[calc(var(--header-height)+min(200px,max(70px,20svh)))]\" dir=\"auto\" data-turn-id=\"request-6a3be693-4000-83ec-acea-09e97e9e1ceb-75\" data-turn-id-container=\"request-6a3be693-4000-83ec-acea-09e97e9e1ceb-75\" data-testid=\"conversation-turn-747\" data-turn=\"assistant\"\u003e\n\u003cdiv class=\"text-base my-auto mx-auto pb-10 [--thread-content-margin:var(--thread-content-margin-xs,calc(var(--spacing)*4))] @w-sm\/main:[--thread-content-margin:var(--thread-content-margin-sm,calc(var(--spacing)*6))] @w-lg\/main:[--thread-content-margin:var(--thread-content-margin-lg,calc(var(--spacing)*16))] px-(--thread-content-margin)\"\u003e\n\u003cdiv data-conversation-screenshot-content=\"\" class=\"[--thread-content-max-width:40rem] @w-lg\/main:[--thread-content-max-width:48rem] mx-auto max-w-(--thread-content-max-width) flex-1 group\/turn-messages focus-visible:outline-hidden relative flex w-full min-w-0 flex-col agent-turn\"\u003e\n\u003cdiv class=\"flex max-w-full flex-col gap-4 grow\"\u003e\n\u003cdiv data-message-author-role=\"assistant\" data-message-id=\"9f44eec4-d675-4746-a212-53cd841ebeb7\" data-turn-start-message=\"true\" dir=\"auto\" data-message-model-slug=\"gpt-5-5\" class=\"min-h-8 text-message relative flex w-full flex-col items-end gap-2 text-start break-words whitespace-normal outline-none keyboard-focused:focus-ring [.text-message+\u0026amp;]:mt-1\" tabindex=\"0\"\u003e\n\u003cdiv class=\"flex w-full flex-col gap-1 empty:hidden\"\u003e\n\u003cdiv class=\"markdown prose dark:prose-invert wrap-break-word w-full dark markdown-new-styling\"\u003e\n\u003ch3 data-section-id=\"17lc1ru\" data-start=\"0\" data-end=\"16\"\u003eDescription:\u003c\/h3\u003e\n\u003cp data-start=\"17\" data-end=\"804\"\u003eThe Ultratech Stepper 1064-701065 Rev. A Theta Wafer Fixture Assembly is a precision mechanical assembly designed to securely support and accurately position wafers during theta-axis alignment in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications, the assembly provides stable rotational positioning for high-precision wafer alignment and exposure. Semiconductor equipment technicians and field service engineers use this fixture assembly for replacement of worn mechanical components, preventive maintenance, and restoration of reliable wafer positioning. The assembly measures approximately 17-1\/4 inches wide. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5ms9th\" data-start=\"806\" data-end=\"823\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-start=\"824\" data-end=\"1471\"\u003eThe Ultratech Stepper 1064-701065 Rev. A Theta Wafer Fixture Assembly is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech photolithography equipment. The assembly supports theta-axis wafer positioning by securely holding the wafer fixture during rotational alignment, helping maintain accurate pattern registration and repeatable lithography performance. Compatibility should be verified using the original part number, revision level, dimensions, and the applicable Ultratech stepper model before installation. \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"5hg6bl\" data-start=\"1473\" data-end=\"1502\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-start=\"1503\" data-end=\"2023\"\u003e• Brand: Ultratech Stepper\u003cbr data-start=\"1529\" data-end=\"1532\"\u003e• Part Number: 1064-701065\u003cbr data-start=\"1558\" data-end=\"1561\"\u003e• Revision: Rev. A\u003cbr data-start=\"1579\" data-end=\"1582\"\u003e• Product Type: Theta Wafer Fixture Assembly\u003cbr data-start=\"1626\" data-end=\"1629\"\u003e• Function: Theta-axis wafer support and rotational positioning\u003cbr data-start=\"1692\" data-end=\"1695\"\u003e• Assembly Type: Precision Mechanical Fixture Assembly\u003cbr data-start=\"1749\" data-end=\"1752\"\u003e• Width: 17-1\/4 in.\u003cbr data-start=\"1771\" data-end=\"1774\"\u003e• Compatible Equipment: Ultratech Wafer Stepper Systems\u003cbr data-start=\"1829\" data-end=\"1832\"\u003e• Mounting: OEM replacement assembly\u003cbr data-start=\"1868\" data-end=\"1871\"\u003e• Installation: Direct OEM replacement\u003cbr data-start=\"1909\" data-end=\"1912\"\u003e• Application: Semiconductor photolithography and wafer alignment systems \u003cspan class=\"\" data-state=\"closed\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-section-id=\"1cz0398\" data-start=\"2025\" data-end=\"2049\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-start=\"2051\" data-end=\"2203\" data-is-last-node=\"\" data-is-only-node=\"\"\u003e• Ultratech Stepper 0516-460800 Theta Stage Assembly\u003cbr data-start=\"2103\" data-end=\"2106\"\u003e• Ultratech Stepper 0515-461100 Wafer Fixture Plate\u003cbr data-start=\"2157\" data-end=\"2160\"\u003e• Ultratech Stepper 01-20-02644 Theta Drive\u003c\/p\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/div\u003e\n\u003c\/section\u003e\n\u003c\/div\u003e","brand":"Ultratech","offers":[{"title":"Used Surplus - Excellent Condition","offer_id":51714361524526,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_e3806b9e-d3ce-493f-9d00-be70c26b2f35.jpg?v=1770424079","url":"https:\/\/plgautomation.com\/products\/ultratech-1064-701065-theta-wafer-fixture-assembly","provider":"PLG Automation ","version":"1.0","type":"link"}