{"product_id":"ultratech-stepper-0516-460800-theta-stage-assembly-ks-equipment","title":"Ultratech Stepper 0516-460800 Theta Stage Assembly KS Equipment","description":"\u003ch3 class=\"PDq2pG_selectionAnchorContainer\" data-end=\"16\" data-start=\"0\" data-section-id=\"17lc1ru\"\u003eDescription:\u003cspan class=\"PDq2pG_selectionAnchor\" aria-hidden=\"true\"\u003e\u003c\/span\u003e\n\u003c\/h3\u003e\n\u003cp data-end=\"712\" data-start=\"17\"\u003eThe Ultratech Stepper 0516-460800 Theta Stage Assembly is a precision rotary stage assembly designed to provide accurate theta-axis rotation and wafer positioning in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech wafer steppers where it enables precise rotational alignment of the wafer chuck during exposure and alignment operations. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn theta stage components, preventive maintenance, and restoration of accurate wafer positioning. The assembly is manufactured by KS Equipment for OEM use in Ultratech stepper systems. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"731\" data-start=\"714\" data-section-id=\"5ms9th\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-end=\"1295\" data-start=\"732\"\u003eThe Ultratech Stepper 0516-460800 Theta Stage Assembly is commonly used in semiconductor wafer fabrication, MEMS manufacturing, advanced packaging, and research facilities operating Ultratech photolithography equipment. The assembly provides smooth, repeatable rotational motion of the wafer stage, ensuring precise angular alignment and accurate pattern registration during lithography processes. Compatibility should be verified using the original part number and the applicable Ultratech stepper model before installation. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"1326\" data-start=\"1297\" data-section-id=\"5hg6bl\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-end=\"1898\" data-start=\"1327\"\u003e• Brand: Ultratech Stepper (KS Equipment OEM)\u003cbr data-end=\"1375\" data-start=\"1372\"\u003e• Part Number: 0516-460800\u003cbr data-end=\"1404\" data-start=\"1401\"\u003e• Product Type: Theta Stage Assembly\u003cbr data-end=\"1443\" data-start=\"1440\"\u003e• Function: Precision theta-axis rotational positioning\u003cbr data-end=\"1501\" data-start=\"1498\"\u003e• Stage Type: Rotary Wafer Stage Assembly\u003cbr data-end=\"1545\" data-start=\"1542\"\u003e• Motion: Theta-Axis Rotation\u003cbr data-end=\"1577\" data-start=\"1574\"\u003e• Compatible Equipment: Ultratech Wafer Stepper Systems\u003cbr data-end=\"1635\" data-start=\"1632\"\u003e• Mounting: OEM replacement assembly\u003cbr data-end=\"1674\" data-start=\"1671\"\u003e• Installation: Direct OEM replacement\u003cbr data-end=\"1715\" data-start=\"1712\"\u003e• Application: Semiconductor photolithography and wafer stage positioning\u003cbr data-end=\"1791\" data-start=\"1788\"\u003e• Designed for continuous-duty semiconductor manufacturing operation. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"1924\" data-start=\"1900\" data-section-id=\"1cz0398\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-is-only-node=\"\" data-is-last-node=\"\" data-end=\"2120\" data-start=\"1926\"\u003e• Ultratech Stepper 01-20-02644 Theta Drive\u003cbr data-end=\"1972\" data-start=\"1969\"\u003e• Ultratech Stepper 0506-245101 Stepper Motor Assembly\u003cbr data-end=\"2029\" data-start=\"2026\"\u003e• Ultratech Stepper 0556-700856-R Theta Stepper Motor\u003c\/p\u003e","brand":"Ultratech","offers":[{"title":"Used Surplus - Excellent Condition","offer_id":51714362179886,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_5be4fb5b-cebe-4e86-aa50-327c0b7b3907.jpg?v=1770424104","url":"https:\/\/plgautomation.com\/products\/ultratech-stepper-0516-460800-theta-stage-assembly-ks-equipment","provider":"PLG Automation ","version":"1.0","type":"link"}