{"product_id":"ultratech-stepper-0516-537100-focus-monitor-assembly-0526-568900","title":"Ultratech Stepper 0516-537100 Focus Monitor Assembly 0526-568900","description":"\u003ch3 class=\"PDq2pG_selectionAnchorContainer\" data-end=\"16\" data-start=\"0\" data-section-id=\"17lc1ru\"\u003eDescription:\u003cspan class=\"PDq2pG_selectionAnchor\" aria-hidden=\"true\"\u003e\u003c\/span\u003e\n\u003c\/h3\u003e\n\u003cp data-end=\"811\" data-start=\"17\"\u003eThe Ultratech Stepper 0516-537100 Focus Monitor Assembly is a precision optical monitoring assembly designed to continuously measure wafer focus and provide real-time feedback to the autofocus system in Ultratech semiconductor photolithography equipment. Commonly installed in Ultratech UltraStep 1000 wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications where accurate focus control is essential for high-resolution lithography. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn focus monitoring components, preventive maintenance, and restoration of precise autofocus performance. Available OEM assemblies include models 0516-537100 and 0526-568900. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"830\" data-start=\"813\" data-section-id=\"5ms9th\"\u003eApplications:\u003c\/h3\u003e\n\u003cp data-end=\"1467\" data-start=\"831\"\u003eThe Ultratech Stepper 0516-537100 Focus Monitor Assembly is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech UltraStep 1000 photolithography systems. The assembly monitors the wafer focal plane and provides continuous feedback to the focus control system, enabling accurate wafer positioning, consistent exposure quality, and repeatable pattern transfer during lithography operations. Compatibility should be verified using the original part number and the applicable Ultratech stepper model before installation. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"1498\" data-start=\"1469\" data-section-id=\"5hg6bl\"\u003eTechnical Specifications:\u003c\/h3\u003e\n\u003cp data-end=\"2094\" data-start=\"1499\"\u003e• Brand: Ultratech Stepper\u003cbr data-end=\"1528\" data-start=\"1525\"\u003e• Product Type: Focus Monitor Assembly\u003cbr data-end=\"1569\" data-start=\"1566\"\u003e• Common Models: 0516-537100, 0526-568900\u003cbr data-end=\"1613\" data-start=\"1610\"\u003e• Model Reference: 250-1\u003cbr data-end=\"1640\" data-start=\"1637\"\u003e• Function: Real-time wafer focus monitoring and optical feedback\u003cbr data-end=\"1708\" data-start=\"1705\"\u003e• System: Autofocus \/ Focus Monitoring Assembly\u003cbr data-end=\"1758\" data-start=\"1755\"\u003e• Compatible Equipment: Ultratech UltraStep 1000 Wafer Stepper Systems\u003cbr data-end=\"1831\" data-start=\"1828\"\u003e• Mounting: OEM replacement assembly\u003cbr data-end=\"1870\" data-start=\"1867\"\u003e• Installation: Direct OEM replacement\u003cbr data-end=\"1911\" data-start=\"1908\"\u003e• Application: Semiconductor photolithography and wafer alignment systems\u003cbr data-end=\"1987\" data-start=\"1984\"\u003e• Designed for continuous-duty semiconductor manufacturing operation. \u003cspan data-state=\"closed\" class=\"\"\u003e\u003c\/span\u003e\u003c\/p\u003e\n\u003ch3 data-end=\"2120\" data-start=\"2096\" data-section-id=\"1cz0398\"\u003eCommon Replacements:\u003c\/h3\u003e\n\u003cp data-is-only-node=\"\" data-is-last-node=\"\" data-end=\"2321\" data-start=\"2122\"\u003e• Ultratech Stepper 0516-537100 Focus Monitor Assembly\u003cbr data-end=\"2179\" data-start=\"2176\"\u003e• Ultratech Stepper 0526-568900 Focus Monitor Assembly\u003cbr data-end=\"2236\" data-start=\"2233\"\u003e• Ultratech Stepper 0523-625800 Focus Converter\u003c\/p\u003e","brand":"Ultratech","offers":[{"title":"Used Surplus - Excellent Condition","offer_id":51714362081582,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0940\/0818\/1038\/files\/Ebay_website_image_a3132943-56d1-460a-9249-a4a06520a59f.jpg?v=1770424100","url":"https:\/\/plgautomation.com\/products\/ultratech-stepper-0516-537100-focus-monitor-assembly-0526-568900","provider":"PLG Automation ","version":"1.0","type":"link"}