The AERA FC-7820-200SLM Mass Flow Controller is a high‑precision device in the FC‑78xx family designed for up to a 200 SLM full‑scale flow (51–200 SLM range), a configuration commonly described for nitrogen (N2) in single‑gas builds. It uses a normally‑closed valve for accurate on/off control and a 9‑pin D electrical interface, paired with 1/4" VCR fittings for robust gas‑line connections. This model is suited for precise gas flow regulation in semiconductor processing, thin‑film deposition, and analytical instrumentation where reliable, repeatable flow at high volumes is required.
