AERA FC-D985c Mass Flow Controller

AERA FC-D985c Mass Flow Controller is a compact, low‑flow MFC designed to precisely meter very small gas streams in semiconductor processing and analytical systems. The model is documented with a nominal range of 50 CCM and appears in listings for related configurations such as FC-D985CT-BH, reflecting the family’s use across different packaging and gas options. Gas examples cited in listings for this family include cyclo‑C5F8, SF6, and C4F6, with other FC‑D985c configurations reported at higher ranges for CF4 in some catalogs. This mass flow controller is used to regulate and monitor flow of specialty process gases, helping maintain stable process conditions in fluorinated gas chemistries and in gas panel assemblies. When selecting this model, verify the exact gas compatibility, inlet/outlet fittings, and electrical interface with the seller or datasheet, since gas options and connector configurations vary by configuration. The FC-D985c line is part of AERA’s precision MFC family, intended for applications that require reliable control of low to mid‑range flow rates in challenging process chemistries found in semiconductor manufacturing and related analytical instrumentation.