Brooks Instrument 5853IABA2D1G2BA Thermal Mass Flow Controller

Brooks Instrument 5853IABA2D1G2BA Thermal Mass Flow Controller is a high-precision gas flow control device in the Brooks SLA5800 family, designed to measure and regulate gas flow in process lines using thermal-mass sensing. As an elastomer-sealed variant of Brooks’ thermal mass flow technology, it shares the family’s performance characteristics, including full-scale accuracy around 1% and repeatability of about 0.25% of rate. The 5850E/SLA5800 family typically offers a flow range from 3 sccm to 30,000 sccm, a maximum pressure rating up to 1500 psi, and an operating temperature range of 5°C to 65°C, making it suitable for precise gas delivery in semiconductor, chemical, and lab processes. For integration and control, this MFC can be driven by Brooks’ 0250 series power supply/readout/control platform, providing setpoint control and readout in compact configurations.