Brooks Instrument 5964C4MDGQ5KA Mass Flow Controller

Brooks Instrument 5964C4MDGQ5KA is a 500 SCCM mass flow controller designed to provide precise gas delivery in analytical instrumentation and process settings. It belongs to Brooks’ GC Mass Flow Controller family and uses thermal mass flow sensing to regulate gas flow, a common approach described for Brooks’ GC MFC lineup with a flow range stated as 210 to 5000 sccm and an accuracy of about 1.5% of set point. This configuration supports stable, repeatable control in gas chromatography systems and other instrumentation that require reliable metering of process or carrier gases, making it suitable for laboratory rigs, analytical instruments, and semiconductor-related gas delivery where accurate flow is essential. The 5964C4MDGQ5KA variant reflects Brooks’ emphasis on precise, controllable gas flow within compact, integrated flow-control modules, enabling dependable performance across applications that demand tight regulation of gas throughput.