Celerity C09-50237 Mass Flow Controller 1SLM Unit

The UFC-9861 1SLM Mass Flow Controller from the 9861 family is a high‑temperature, metal‑sealed mass flow controller and meter designed for precise gas delivery in demanding processes. Originally developed by Unit Instruments (later Celerity Inc.) and now manufactured under the Brooks Instrument umbrella, the 9861 series is described as thermal mass flow controllers and meters built to handle challenging high‑temperature delivery of condensable precursors and dopants. This specific unit targets a 1 standard liter per minute (1SLM) full‑scale range and carries the UFC‑9861 designation with part number C09‑50237. Its construction and performance are oriented toward reliable measurement and control in semiconductor and chemical processing environments, where stable gas flow is essential for processes such as precursor delivery and dopant administration.