Celerity UFC-8561-10L-AR Mass Flow Controller

The Celerity UFC-8561 Mass Flow Controller is a compact, 8560-series gas-flow device designed for precise delivery of small volumes. The unit uses a 1.125-inch footprint and a 9-pin network interface, with a C-Seal for a robust, leak-tight seal. This 8561 variant supports high-purity metal seals and includes RS-485 digital and an optional analog interface for setpoint control and status feedback depending on the connector configuration. The model is specified for a flow rate of 100 SCCM, making it suitable for low-flow applications that require tight regulation. It is part of Celerity’s 8560-series family of mass flow controllers and meters, documented to include high-purity metal-seal options and digital/analog interfaces. Current listings note that UFC-8561 has been discontinued by the manufacturer, with third-party vendors offering remaining stock or repair services within the 8560 family. For clean-room or analytical instrumentation contexts, the combination of a small form factor and sealed interfaces helps minimize leak risk while enabling reliable gas-delivery control.