Celerity UFC-8565 Flow Meter

CELERITY UFC-8565 Flow Meter is a high‑purity mass flow meter (no valve) designed to precisely measure process-gas flow in semiconductor manufacturing and related applications. The unit is built with metal seals for contamination control and is available with network interfaces such as DeviceNet or PROFIBUS for easy integration into automated gas-supply systems. The UFC‑8565 family includes variants like UFC‑8565C, which is configured for nitrogen with a 300 cc flow path, illustrating the line’s configurable chamber options (300 cc and 500 cc configurations appear in related UFC‑8565 configurations). Supported gases include common process species such as N2 and O2, underscoring its suitability for high-purity gas delivery. Sealing typically employs C‑Seals, a characteristic of this Celerity lineage, and the device is intended for metering rather than actuation, meaning a separate downstream valve is usually used in a control loop. This makes the UFC‑8565 ideal for feedback-controlled gas flows in processes like chemical vapor deposition (CVD) and other gas-delivery regimes where accurate, traceable flow measurement is critical.