Fujikin FCSP8202D-4CW2-F500F50 Flow Control System

Description:

The Fujikin P8000D / FCSP8202D-4CW2-F500F50 Flow Control System is used in precision gas delivery systems for measuring, regulating, and controlling process gas flow in semiconductor and high-purity manufacturing applications. Commonly installed in semiconductor fabrication equipment, gas panels, analytical instrumentation, vacuum systems, and ultra-high purity process lines requiring accurate mass flow control. Maintenance teams and system integrators use this system for replacement, retrofit, expansion, or repair of semiconductor gas handling and fluid control systems.

Applications:

The Fujikin P8000D flow control system is commonly used in semiconductor wafer processing equipment, CVD and PVD systems, gas blending panels, research laboratories, and analytical instrumentation where precise gas flow regulation is critical to process consistency and yield performance. The FCSP800 series is designed for ultra-high purity gas applications requiring stable flow control, high repeatability, and contamination-free operation.

Technical Specifications:

• Brand: Fujikin
• Part Number: P8000D / FCSP8202D-4CW2-F500F50
• Product Type: Flow Control System
• Series: FCSP800 Series
• Controller Type: Mass Flow Controller
• Measurement Type: Mass Flow Measurement
• Control Method: Closed Loop Flow Control
• Media Type: Process Gases
• Flow Capacity: F500 Range Configuration
• Mounting Type: Panel Mount
• Function: Precision Gas Flow Regulation
• Application: Semiconductor Gas Delivery Systems
• Operating Environment: Semiconductor and High Purity Process Equipment

Common Replacements:

• Fujikin FCST Series Mass Flow Controller
• Brooks GF40 Mass Flow Controller
• Horiba STEC SEC Series Mass Flow Controller