Hastings Instruments 200H Mass Flowmeter

The Hastings 200H Thermal Mass Flowmeter precisely measures mass flow of clean gases without pressure or temperature compensation, suitable for laboratory, industrial, and process-control applications. Commonly installed in semiconductor manufacturing equipment, analytical instrumentation, gas blending systems, environmental monitoring equipment, leak testing systems, research laboratories, and OEM process gas delivery systems, the device supports a flow range from 0–10 sccm up to 0–25 slm (nitrogen-equivalent, model dependent) with an accuracy of ±1.0% of full scale and repeatability of ±0.05% FS. It tolerates up to 500 PSIG (1000 PSIG optional) and provides standard 0–5 VDC analog output, with optional 4–20 mA or 0–20 mA outputs. Wetted materials are 316L stainless steel, with seals selected per model (Viton®, Kalrez®, Buna-N, or Neoprene). Electrical interfaces include either a 15-pin D-sub (+/-15 VDC) or a 9-pin D-sub (+24 VDC), and power is supplied at ±14–16 VDC or 14–32 VDC depending on configuration. Standard calibration is for nitrogen, with optional correction-factor calibration for other gases. Commonly used by maintenance technicians, calibration specialists, and system integrators for repair, retrofit, replacement, and preventive maintenance of gas flow measurement and control systems. Applications span semiconductor processing, gas chromatography, environmental monitoring, pharmaceutical manufacturing, medical research, thin-film deposition, chemical processing, leak-detection equipment, gas-mixing systems, calibration laboratories, and industrial process control. Replacements include Hastings HFM-200, HFM-201, and HFM-205.