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Horiba Stec, Inc. SEC-7330M-2SLM-He Mass Flow Controller
Horiba Stec, Inc. SEC-7330M-2SLM-He Mass Flow Controller
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Description:
The Horiba STEC SEC-7330M-2SLM-He Mass Flow Controller is a helium-specific device designed to deliver precise, repeatable regulation of helium gas flow in semiconductor processing and related lab applications. Configured for helium with a 2 standard liters per minute full-scale range, it enables tight control of process gas delivery in tools and systems that require timely response to setpoint changes. As part of Horiba STEC's SEC family, it combines a thermal mass flow sensor with a precision valve to maintain stable flow across its operating range, supporting integration into standard gas delivery circuits and process tools.
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