Industrial 01-20-02644 Theta Drive Assembly

Description:

The Ultratech Stepper 01-20-02644 Theta Drive is a precision rotary drive assembly designed to provide accurate theta-axis rotation and wafer positioning in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech wafer steppers where it controls rotational alignment of the wafer stage to ensure precise pattern registration during lithography. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn theta drive mechanisms, preventive maintenance, and restoration of accurate wafer alignment performance.

Applications:

The Ultratech Stepper 01-20-02644 Theta Drive is commonly used in semiconductor wafer fabrication, MEMS manufacturing, advanced packaging, and research facilities operating Ultratech photolithography equipment. The theta drive provides controlled rotational movement of the wafer stage, enabling precise angular alignment required for high-resolution lithographic exposure. Compatibility should be verified using the original part number, revision level, and applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 01-20-02644
• Product Type: Theta Drive Assembly
• Function: Precision wafer stage rotational positioning
• Motion Type: Theta-Axis Rotary Drive
• Compatible Equipment: Ultratech Wafer Stepper Systems
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer alignment systems
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 01-15-04611
• Ultratech Stepper 01-15-03796
• Ultratech Stepper 0556-700856-R