Industrial 03-15-05643 Printed Circuit Board PCB

Description:

The Ultratech Stepper 03-15-05643 Theta Vac Chuck Clamp Board is an industrial printed circuit board (PCB) designed to control the theta-axis vacuum chuck clamping functions in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech 4700 and Titan wafer steppers where it manages vacuum chuck clamping, theta stage control, and signal interfacing for precise wafer positioning during lithography processes. Semiconductor equipment technicians and field service engineers use this board for replacement of failed control PCBs, preventive maintenance, and restoration of accurate wafer handling and stage operation.

Applications:

The Ultratech Stepper 03-15-05643 Theta Vac Chuck Clamp Board is commonly used in semiconductor wafer fabrication, MEMS manufacturing, advanced packaging, and research facilities operating Ultratech 4700 and Titan photolithography equipment. The board controls the vacuum chuck clamp mechanism and theta-axis functions to ensure secure wafer retention and precise rotational alignment during exposure. Compatibility should be verified using the original part number and applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 03-15-05643
• Product Type: Theta Vac Chuck Clamp Board / Printed Circuit Board (PCB)
• Function: Vacuum chuck clamp and theta-stage control
• System: Wafer Chuck Assembly
• Compatible Equipment: Ultratech 4700 and Titan Wafer Stepper Systems
• Board Type: Industrial Motion Control PCB
• Mounting: OEM replacement board
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer handling systems
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 03-15-07175
• Ultratech Stepper 03-15-02702
• Ultratech Stepper 03-20-01321