Industrial 0513-4197-00 Stage Servo Controller Board

Description:

The Ultratech Stepper 0513-4197-00 Rev. 5 Stage Servo Board (Semifusion Model 151) is a high-performance motion control printed circuit board (PCB) designed to provide closed-loop servo control for the precision wafer stage in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech UltraStep 1000 wide-field wafer steppers where it controls stage positioning, velocity, and feedback to ensure accurate wafer alignment and exposure. Semiconductor equipment technicians and field service engineers use this servo board for replacement of failed motion control electronics, preventive maintenance, and restoration of precise stage performance.

Applications:

The Ultratech Stepper 0513-4197-00 Rev. 5 Stage Servo Board is commonly used in semiconductor wafer fabrication, MEMS manufacturing, advanced packaging, and research facilities operating Ultratech UltraStep 1000 photolithography systems. Manufactured by Semifusion as Model 151, the board performs closed-loop servo control of the wafer stage, ensuring smooth motion, accurate positioning, and repeatable lithography performance. Compatibility should be verified using the original part number, revision level, and applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 0513-4197-00
• Revision: Rev. 5
• Manufacturer: Semifusion Corp.
• Model: 151
• Product Type: Stage Servo Board / Motion Control PCB
• Function: Closed-loop wafer stage servo control
• Board Type: Industrial Motion Control Printed Circuit Board (PCB)
• Compatible Equipment: Ultratech UltraStep 1000 Wide Field Wafer Stepper Systems
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer stage motion control systems

Common Replacements:

• Ultratech Stepper 0513-555000 Rev. A
• Ultratech Stepper 0513-4197-00 Rev. 2
• Semifusion Model 152 Stage Servo Board