Industrial 0515-461100 Wafer Fixture Plate Assembly

Description:

The Ultratech Stepper 0515-461100 Wafer Fixture Plate is a precision mechanical fixture designed to securely support and accurately position semiconductor wafers during photolithography setup, alignment, calibration, and processing operations. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications where repeatable wafer positioning is essential for high-resolution exposure. Semiconductor equipment technicians and field service engineers use this fixture plate for replacement of worn wafer support components, preventive maintenance, and restoration of precise wafer handling performance.

Applications:

The Ultratech Stepper 0515-461100 Wafer Fixture Plate is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech photolithography systems. The fixture plate provides a stable mounting surface for wafer alignment, inspection, and exposure, ensuring consistent positioning and improved lithography accuracy. Compatibility should be verified using the original part number and the applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 0515-461100
• Product Type: Wafer Fixture Plate
• Function: Precision wafer support and positioning
• Component Type: Mechanical Fixture Assembly
• Compatible Equipment: Ultratech Wafer Stepper Systems
• Material: Precision-machined metal (OEM specification)
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer handling systems
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 01-20-02645
• Ultratech Stepper 01-20-03947
• Ultratech Stepper 01-20-08947