Industrial 1002-324200 Autoload Arm Wafer Handling Assembly

Description:

The Ultratech Stepper 1002-324200 Autoload Arm is a precision wafer handling assembly designed to automate wafer loading and unloading in Ultratech semiconductor photolithography systems. Commonly installed in Ultratech 990, 1000, 1100, 1500, and 1700 wafer steppers, this assembly incorporates the 0513-470400 Lower Flat Finder Board to detect wafer orientation and ensure accurate positioning prior to transfer and exposure. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn autoloader components, preventive maintenance, and restoration of reliable automated wafer handling performance.

Applications:

The Ultratech Stepper 1002-324200 Autoload Arm is commonly used in semiconductor wafer fabrication, MEMS manufacturing, and research facilities operating Ultratech wafer steppers equipped with Smart Autoloaders. The integrated 0513-470400 Lower Flat Finder PCB detects the wafer flat on 4-inch, 5-inch, and 6-inch wafers, enabling proper orientation and accurate transfer to the exposure stage. Compatibility should be verified using the original part number, board revision, and applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 1002-324200
• Revision: Rev. D (application dependent)
• Product Type: Autoload Arm Assembly
• Integrated PCB: 0513-470400 Lower Flat Finder Board
• Board Function: Wafer flat detection and orientation
• Wafer Compatibility: 4 in., 5 in., and 6 in. wafers
• Autoloader Type: Smart Autoloader
• Function: Automated wafer loading and positioning
• Compatible Equipment: Ultratech 990, 1000, 1100, 1500, and 1700 Wafer Stepper Systems
• Installation: Direct OEM replacement

Common Replacements:

• Ultratech Stepper 1002-373700
• Ultratech Stepper 1002-346300
• Ultratech Stepper 0513-470400