Industrial 13-20-00761 Air Gauge Sensor Assembly

Description:

The Ultratech Stepper 13-20-00761 Air Gauge Sensor is used in semiconductor photolithography systems to measure and monitor precision air gap distances for wafer stage positioning and focus control. Commonly installed in Ultratech wafer steppers, semiconductor manufacturing equipment, and cleanroom wafer fabrication facilities. Maintenance teams and semiconductor equipment service providers use this air gauge sensor for equipment repairs, preventive maintenance, and replacement of failed OEM sensing components.

Applications:

The Ultratech Stepper 13-20-00761 Air Gauge Sensor is commonly used in semiconductor wafer steppers, air gauge measurement systems, wafer stage positioning assemblies, focus control systems, and cleanroom manufacturing environments requiring high-precision non-contact distance measurement for semiconductor production. 

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 13-20-00761
• Product Type: Air Gauge Sensor
• Function: Precision air gap measurement and position sensing
• Sensor Type: Air Gauge Sensor Assembly
• Measurement Method: Non-contact pneumatic sensing
• System Compatibility: Ultratech Wafer Stepper Systems
• Installation: Direct OEM Replacement
• Application: Semiconductor Photolithography Equipment
• Industrial Applications: Semiconductor Manufacturing and Cleanroom Wafer Fabrication

Common Replacements:

• Ultratech Stepper 13-20-00761 Rev. A Air Gauge Sensor
• Ultratech Stepper 0553-700813 Air Gauge Sensor Assembly
• Ultratech Stepper 03-06-00035 Air Gauge Controller