Industrial 828.151.100 Turbo Vacuum Pump Unit

Description:

The Turbo Vacuum Pump 828.151.100 is used in high-vacuum and ultra-high-vacuum applications to remove gases and contaminants from sealed chambers, enabling clean and controlled processing environments. Commonly installed in semiconductor manufacturing equipment, analytical instruments, coating systems, research laboratories, and industrial vacuum processing systems. Maintenance technicians, engineers, and OEM service personnel use this pump for vacuum generation, system maintenance, and replacement applications.

Applications:

The Turbo Vacuum Pump 828.151.100 is designed to generate high-vacuum conditions by utilizing high-speed turbomolecular pumping technology. It is commonly used in vacuum coating equipment, electron microscopy systems, mass spectrometry instruments, semiconductor processing equipment, and scientific research facilities. The pump helps achieve clean vacuum environments, improve process reliability, and support precision manufacturing operations.

Technical Specifications:

• Part Number: 828.151.100
• Product Type: Turbo Vacuum Pump
• Function: High-vacuum generation and gas evacuation
• Pump Technology: Turbomolecular Vacuum Pump
• Application: High and ultra-high vacuum systems
• Compatible Equipment: Vacuum chambers, analytical instruments, and process equipment
• Operating Principle: High-speed turbine rotor gas compression
• Installation Type: System-mounted vacuum pump
• Construction: Industrial vacuum pump assembly
• Service Use: Replacement and repair component
• Industry Applications: Semiconductor manufacturing, scientific research, vacuum coating, analytical instrumentation, and industrial processing
• Designed For: Clean vacuum generation and process chamber evacuation

Common Replacements:

• Pfeiffer Vacuum turbomolecular pump
• Edwards Vacuum turbomolecular pump
• Leybold TURBOVAC pump series