Industrial FC-2960MEP5 Mass Flow Controller

Description:

The TYLAN FC-2960MEP5 Mass Flow Controller 2960 Series 3 SLPM N2 is used in precision gas flow control systems for semiconductor manufacturing, laboratory instrumentation, and industrial process automation. Commonly installed in semiconductor processing equipment, gas delivery systems, vacuum process tools, analytical instruments, and research laboratories requiring accurate nitrogen gas flow regulation. Maintenance teams and system integrators use this mass flow controller for repair, retrofit, replacement, and process automation upgrades. 

Applications:

The TYLAN FC-2960MEP5 Mass Flow Controller 2960 Series is designed to accurately measure and regulate nitrogen gas flow in high-purity process applications. It is widely used in semiconductor fabrication, chemical vapor deposition (CVD) systems, vacuum coating equipment, gas blending panels, analytical instrumentation, pharmaceutical manufacturing, and laboratory environments where precise nitrogen flow control is essential. 

Technical Specifications:

• Manufacturer: TYLAN General (Millipore)
• Part Number: FC-2960MEP5
• Product Type: Mass Flow Controller
• Function: Precision Gas Flow Measurement and Control
• Application: Semiconductor Processing, Laboratory, and Industrial Gas Delivery Systems
• Compatible Equipment: TYLAN 2960 Series Gas Control Systems and Semiconductor Process Equipment
• Series: 2960 Series
• Flow Capacity: 3 SLPM
• Calibration Gas: Nitrogen (N₂)
• Control Type: Closed-Loop Electronic Mass Flow Control
• Input/Output Signal: 0–5 VDC (Model Dependent)
• Power Supply: ±15 VDC Nominal
• Connector Type: 4 VCR (1/4 in.)
• Interface: Card Edge
• Mounting Type: Inline Process Installation
• Industrial Duty Construction
• Designed for Continuous Service Operation
• OEM Replacement Mass Flow Controller

Common Replacements:

• TYLAN FC-2960MEP5 1 SLPM N2 Mass Flow Controller
• TYLAN FC-2960MEP5 2 SLPM N2 Mass Flow Controller
• TYLAN FC-2960MEP5 20 SLPM N2 Mass Flow Controller