The Aera FC-7810CD Mass Flow Controller is a metal-sealed gas-flow control device used in semiconductor processing to precisely regulate process-gas delivery. It specifies a full-scale flow range from 10 sccm up to 5 slm, with common configurations reaching about 20,000 sccm (20 slpm) depending on the gas. This unit is designed for inert and corrosive gases and has been deployed as a spare part in tools from major vendors such as Novellus. The FC-7810CD is an Aera (Advanced Energy) product and uses a 9-pin D electrical connector for control signals, aligning with the FC-R7800 series architecture.
