Industrial FC-D980C-DA-KN069-SB Mass Flow Controller

Industrial FC-D980C-DA-KN069-SB Mass Flow Controller from Advanced Energy's Aera line is a digital, closed-loop gas-flow controller designed for precise delivery of ultra-small to mid-range gas flows in semiconductor equipment and related laboratory systems. The FC-D980C family covers a broad range—from 10 SCCM up to 5 SLM—and implements a normally closed output path for reliable shutoff when not commanded. Documented observations and marketplace listings show FC-D980C variants used with gases such as helium (around 200 SCCM), CHF3, SF6, and SiH4 in process and research settings. Manufactured under the Advanced Energy Aera brand, the FC-D980C is cited in semiconductor equipment literature as a high-precision gas-flow controller used to regulate propellant and process-gas deliveries.