The AERA FC-D980CBP Mass Flow Controller is an industrial, nitrogen (N2) mass flow controller with a 1000 sccm full-scale flow, designed to precisely regulate nitrogen gas in gas-delivery systems. It enables accurate setpoint control of N2 flow for semiconductor processing tools, thin-film deposition systems, and analytical instrumentation, helping ensure stable gas supply and repeatable process conditions. As part of the FC-D980 family, the FC-D980CBP is configured for nitrogen operation and is intended for integration into reliable, repeatable gas-control networks in demanding manufacturing environments.
