Industrial Ultratech Stepper Inspection Prism Reticle Reflective Assembly 1-3/4 x 1-3/4

Description:

The Ultratech Stepper Inspection Prism Reticle Reflective Assembly is a precision optical assembly designed to inspect, reflect, and direct illumination within the reticle inspection system of Ultratech semiconductor photolithography equipment. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications where accurate reticle inspection and optical alignment are critical. Semiconductor equipment technicians and field service engineers use this optical assembly for replacement of worn or damaged inspection prisms, preventive maintenance, and restoration of high-precision lithography performance. This assembly measures approximately 1-3/4 in. × 1-3/4 in..

Applications:

The Ultratech Stepper Inspection Prism Reticle Reflective Assembly is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech photolithography systems. The prism assembly reflects and redirects optical signals within the reticle inspection path, enabling accurate reticle alignment, defect inspection, and exposure system calibration. Compatibility should be verified using the physical dimensions, optical configuration, and applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Product Type: Inspection Prism Reticle Reflective Assembly
• Dimensions: 1-3/4 in. × 1-3/4 in.
• Function: Reticle inspection and optical beam reflection
• Assembly Type: Precision Optical Prism Assembly
• System: Reticle Inspection / Optical Alignment
• Compatible Equipment: Ultratech Wafer Stepper Systems
• Material: Precision optical glass prism
• Mounting: OEM replacement optical assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and reticle inspection systems

Common Replacements:

• Ultratech Stepper 690-0130-001 Inspection Prism Reticle Reflective
• Ultratech Stepper 0514-372500 1100 "E" Light Pipe Prism
• Ultratech Stepper Y-Stage Mirror Optical Assembly 0505-3750001