SMC Corporation 10-15-01927 Pneumatic Pressure Regulator

Description:

The Ultratech Stepper 10-15-01927 SMC Pressure Regulator is an OEM pneumatic pressure regulation component designed to provide stable and controlled compressed air pressure for critical pneumatic subsystems in Ultratech semiconductor photolithography equipment. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications where consistent air pressure is essential for wafer handling, focus monitoring, and precision motion systems. Semiconductor equipment technicians and field service engineers use this regulator for replacement of worn pneumatic components, preventive maintenance, and restoration of reliable machine performance.

Applications:

The Ultratech Stepper 10-15-01927 SMC Pressure Regulator is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech photolithography systems. The regulator maintains a constant downstream air pressure for pneumatic actuators and control circuits, helping ensure repeatable wafer positioning and stable operation of air-driven subsystems. Compatibility should be verified using the original Ultratech part number and the installed SMC regulator model before installation.

Technical Specifications:

• Brand: Ultratech Stepper / SMC
• Part Number: 10-15-01927
• Product Type: Pneumatic Pressure Regulator
• Manufacturer: SMC Corporation
• Function: Compressed air pressure regulation
• Media: Clean, dry compressed air
• Mounting: OEM replacement component
• Compatible Equipment: Ultratech Wafer Stepper Systems
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography pneumatic control systems
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• SMC AR20 Series Pressure Regulator
• SMC AR30 Series Pressure Regulator
• SMC IR2000 Precision Regulator