SMC XLA-16 High Vacuum Valve

SMC XLA-16 High Vacuum Valve is an aluminum-bodied high-vacuum angle valve in the XLA family, designed for clean, leak-tight vacuum lines used in semiconductor manufacturing and related equipment. The flange size is 16, with published dimensions showing A about 40 mm and B around 103 mm on the older XLA-16 spec, and 108 mm for the newer XLA-16-2 variant, plus a C of 38 mm, a G of 17 mm, and an overall height of 40 mm (older) or 44 mm (newer); weight is about 0.25 kg, and it offers a conductance of 5 L/s. Within the XLA family, variants such as XLA-C, XLA-F, and XLA-G are available, and some configurations provide normally closed operation with bellows-seal designs (for example XLAV-16-2) to enhance leak-tight performance. This valve is suited for high-vacuum process lines, semiconductor deposition and analysis equipment, where reliable actuation and compatibility with standard vacuum flanges are essential.