STEC Incorporated SEC-4500M Mass Flow Controller

The STEC Incorporated SEC-4500M Mass Flow Controller is a 10 SLM gas MFC designed for precise, real‑time regulation of process gas delivery in semiconductor fabrication. This SEC‑4500M variant uses 1/4" VCR fittings, a common configuration for integration into standard gas manifolds and tooling in cleanroom environments. Verified configurations in the SEC‑4500M family include a 10 SLM Ar (argon) version and a 20 LM (liter per minute) variant used with gases such as nitrogen (N2) or oxygen (O2), illustrating the model’s versatility across typical process chemistries. Functioning as both a flow sensor and a control valve actuator, it provides closed‑loop regulation to maintain a stable gas flow during critical steps like deposition and etching. The SEC‑4500M is positioned for use in semiconductor equipment and other precision gas‑handling applications where repeatable flow is essential. As a legacy STEC/HORIBA product line, it embodies the robust, compact design typical of SEC devices and can be sourced through semiconductor equipment suppliers as refurbished or new units. In short, this 10 SLM SEC‑4500M offers a dedicated, narrow‑band gas flow solution for customers who need dependable, high‑purity gas delivery with a familiar SEC platform footprint.