Tegal Corporation 53-024-003 Sensor Assembly

Description:

The Tegal Corporation 53-024-003 Sensor Assembly is used in semiconductor plasma etching equipment to detect and monitor critical machine conditions for precise wafer processing and automated equipment control. Commonly installed in Tegal plasma etchers and semiconductor fabrication systems where reliable sensor feedback is required for process monitoring, chamber operation, and equipment sequencing. Maintenance teams and system integrators use this part for repair, retrofit, expansion, or replacement of failed sensor assemblies to restore dependable operation of semiconductor manufacturing equipment.

Applications:

The Tegal Corporation 53-024-003 Sensor Assembly is designed for semiconductor plasma etching systems used in wafer fabrication. It provides position or process sensing for automated chamber operation, wafer handling, equipment interlocks, and process control within plasma etchers used in semiconductor manufacturing, research laboratories, and electronic component production facilities.

Technical Specifications:

• Manufacturer: Tegal Corporation
• Manufacturer Part Number (MPN): 53-024-003
• Product Type: Sensor Assembly
• Function: Process/Position Sensor Assembly for Semiconductor Equipment
• Compatible Equipment: Tegal Plasma Etching Systems (model dependent)
• Installation: Internal equipment assembly
• Construction: Industrial electronic sensor assembly
• Application: Equipment monitoring and process control
• Mounting: OEM machine mounting configuration
• Service Purpose: Replacement sensor assembly for preventive maintenance and repair
• Industry: Semiconductor Manufacturing Equipment
• Typical Applications: Plasma Etchers, Wafer Processing Systems, Semiconductor Fabrication Equipment, and Research Laboratories.

Common Replacements:

• Tegal 98-176-001
• Tegal 99-089-001
• Tegal 99-165-002