Teledyne Hastings Instruments HFC-302 Mass Flow Controller

Description:

The Teledyne Hastings Instruments HFC-302 Mass Flow Controller is used to accurately measure and control the flow of gases in industrial, laboratory, and research applications using thermal mass flow sensing technology. Commonly installed in semiconductor manufacturing equipment, analytical instrumentation, gas blending systems, environmental monitoring equipment, fuel cell testing, and industrial process control systems requiring precise gas flow regulation. Maintenance technicians, process engineers, and system integrators use this mass flow controller for equipment repair, process optimization, system upgrades, and replacement of existing gas flow control devices.

Applications:

The Teledyne Hastings Instruments HFC-302 Mass Flow Controller is commonly used in semiconductor fabrication, gas chromatography, environmental emissions monitoring, pharmaceutical manufacturing, chemical processing, laboratory research, laser gas delivery systems, and OEM process equipment where accurate and repeatable gas flow control is critical for process performance.

Technical Specifications:

• Manufacturer: Teledyne Hastings Instruments
• Part Number: HFC-302
• Product Type: Thermal Mass Flow Controller
• Flow Range: User configurable from 0–10 sccm to 0–25 slm (Nitrogen equivalent)
• Measurement Principle: Constant temperature differential thermal mass flow sensing
• Accuracy: ±0.75% of full scale (5 sccm to 10 slm), ±1.0% of full scale (10 slm to 25 slm)
• Repeatability: ±0.07% of full scale
• Maximum Working Pressure: 500 PSIG (1000 PSIG optional)
• Standard Analog I/O: 0–5 VDC
• Optional Analog I/O: 4–20 mA or 0–20 mA
• Electrical Connector: 15-pin D-sub connector
• Wetted Materials: 316L stainless steel, Nickel 200, 302 stainless steel, Kalrez valve seat
• Fitting Options: VCR®, VCO®, Swagelok®, Straight Thread, Surface Mount
• Power Requirement: ±15 VDC @ 55 mA
• Applications: Precision gas flow measurement and control for industrial and laboratory systems

Common Replacements:

• Teledyne Hastings HFC-202
• Teledyne Hastings HFC-303
• Teledyne Hastings HFC-D-302B