Tylan Corp. FC-260-2-SLPM-02 Mass Flow Controller

Description:

The Tylan Corp. FC-260-2-SLPM-02 Mass Flow Controller is a precision thermal mass flow controller designed to accurately measure and regulate gas flow in semiconductor, laboratory, and industrial process applications. Commonly installed in semiconductor manufacturing equipment, gas delivery systems, analytical instruments, vacuum processing equipment, and research laboratories requiring a controlled flow rate of 2 SLPM. Maintenance technicians, process engineers, and system integrators use this mass flow controller for equipment repair, process monitoring, calibration, and replacement of worn OEM flow controllers to maintain precise and repeatable gas delivery. The FC-260 series is rated for a maximum operating pressure of 150 PSIG and utilizes a solid-state control valve with a Type 316 stainless steel flow path.

Applications:

The Tylan Corp. FC-260-2-SLPM-02 Mass Flow Controller is commonly used in semiconductor fabrication, chemical vapor deposition (CVD), plasma etching, gas blending systems, vacuum coating equipment, analytical laboratories, pharmaceutical manufacturing, and industrial process control. Its thermal mass flow sensing technology provides accurate, pressure- and temperature-compensated gas flow control, making it ideal for critical applications requiring high repeatability, fast response, and long-term stability.

Technical Specifications:

• Brand: Tylan Corp. (Millipore)
• Model: FC-260-2-SLPM-02
• Series: FC-260
• Product Type: Thermal Mass Flow Controller
• Flow Capacity: 2 SLPM (Standard Liters per Minute)
• Maximum Operating Pressure: 150 PSIG
• Measurement Principle: Thermal Mass Flow
• Control Valve: Integrated Solid-State Valve Assembly
• Wetted Materials: Type 316 Stainless Steel
• Seal Type: Elastomer-Sealed
• Mounting: Multi-Position (Attitude Insensitive)
• Electrical Output: Analog Output (configuration dependent)
• Application: Semiconductor Gas Delivery, Laboratory Gas Control, and Industrial Process Systems

Common Replacements:

• Brooks 5850E Series 2 SLPM Mass Flow Controller
• MKS Instruments 1179A 2 SLPM Mass Flow Controller
• Parker Veriflo Series II Standard Mass Flow Controller