Tylan Corporation FC-261-10SLPM-B-02 Mass Flow Controller

Description:

The Tylan Corp. FC-261-10SLPM-B-02 Mass Flow Controller is a precision thermal mass flow controller designed to accurately measure and regulate gas flow in semiconductor manufacturing, laboratory, and industrial process applications. Commonly installed in gas delivery panels, vacuum systems, chemical vapor deposition (CVD) equipment, analytical instruments, and research laboratories requiring a full-scale flow rate of 10 SLPM. Maintenance technicians, process engineers, and system integrators use this controller for equipment repair, calibration, process optimization, and replacement of worn OEM mass flow controllers to ensure precise and repeatable gas flow. The FC-261 series is rated for a maximum operating pressure of 150 PSIG and utilizes a Type 316 stainless steel flow path with an integrated proportional control valve.

Applications:

The Tylan Corp. FC-261-10SLPM-B-02 Mass Flow Controller is commonly used in semiconductor fabrication, plasma etching systems, CVD and PVD equipment, gas mixing systems, environmental testing equipment, pharmaceutical manufacturing, and industrial process control. Its thermal mass flow sensing technology provides accurate gas flow measurement and closed-loop control independent of pressure and temperature variations, making it ideal for critical process applications.

Technical Specifications:

• Brand: Tylan Corp. (Millipore)
• Model: FC-261-10SLPM-B-02
• Series: FC-261
• Product Type: Thermal Mass Flow Controller
• Full Scale Flow Rate: 10 SLPM (Standard Liters per Minute)
• Maximum Operating Pressure: 150 PSIG
• Measurement Principle: Thermal Mass Flow
• Control Valve: Integrated Proportional Solenoid Valve
• Wetted Materials: Type 316 Stainless Steel
• Electrical Connector: Amphenol 583718-1 A-MP
• Identification Number: 7728
• Mounting: Multi-Position Installation
• Application: Semiconductor Gas Delivery, Laboratory Gas Control, and Industrial Process Systems

Common Replacements:

• Brooks 5850E Series 10 SLPM Mass Flow Controller
• MKS Instruments 1179A 10 SLPM Mass Flow Controller
• Alicat MC Series 10 SLPM Mass Flow Controller