Tylan FC-260-150SCCCM-SIH4-USNP Mass Flow Controller

Description:

The Tylan FC-260 Mass Flow Controller is a precision thermal mass flow controller designed to accurately measure and regulate silane (SiH₄) gas flow in semiconductor manufacturing and industrial gas delivery systems. Commonly installed in chemical vapor deposition (CVD) equipment, plasma etching systems, gas cabinets, vacuum process equipment, and research laboratories requiring a full-scale flow capacity of 150 SCCM. Maintenance technicians, process engineers, and system integrators use this controller for equipment repair, calibration, process optimization, and replacement of worn OEM mass flow controllers to ensure precise and repeatable gas delivery. The FC-260 Series features a maximum operating pressure of 150 PSIG and a Type 316 stainless steel wetted flow path for compatibility with high-purity and reactive gases.

Applications:

The Tylan FC-260 Mass Flow Controller is commonly used in semiconductor wafer fabrication, CVD and plasma processing systems, gas blending panels, analytical instrumentation, photovoltaic manufacturing, and laboratory gas handling systems. Calibrated for silane (SiH₄), it provides accurate closed-loop mass flow control independent of pressure and temperature variations, making it suitable for critical high-purity gas delivery applications.

Technical Specifications:

• Brand: Tylan General (Millipore)
• Model: FC-260
• Series: 260 Series
• Product Type: Thermal Mass Flow Controller
• Gas Calibration: Silane (SiH₄)
• Full Scale Flow Rate: 150 SCCM
• Maximum Operating Pressure: 150 PSIG
• Measurement Principle: Thermal Mass Flow
• Control Range: 50:1 (100% to 2% Full Scale)
• Accuracy: ±1% Full Scale
• Repeatability: ±0.2% Full Scale
• Wetted Materials: Type 316 Stainless Steel
• Seal Material: Viton®, Kalrez®, or Neoprene (gas application dependent)
• Output Signal: 0–5 VDC Analog
• Power Supply: ±15 VDC
• Application: Semiconductor Gas Delivery and Industrial Process Control

Common Replacements:

• Brooks 5850E Series 150 SCCM Mass Flow Controller
• MKS Instruments 1179A 150 SCCM Mass Flow Controller
• Horiba STEC SEC-4400 Series 150 SCCM Mass Flow Controller