Tylan FC-261-7SLPM-O2-150PSIG-USNP Mass Flow Controller

Description:

The Tylan FC-261 Mass Flow Controller is a precision thermal mass flow controller designed to accurately measure and regulate oxygen (O₂) gas flow in semiconductor manufacturing, laboratory, and industrial process applications. Commonly installed in gas delivery panels, semiconductor process equipment, analytical instruments, vacuum systems, and research laboratories requiring a full-scale flow rate of 7 SLPM. Maintenance technicians, process engineers, and system integrators use this controller for equipment repair, calibration, process optimization, and replacement of worn OEM mass flow controllers to ensure precise, repeatable gas flow control. The FC-261 Series is rated for a maximum operating pressure of 150 PSIG and features a Type 316 stainless steel flow path compatible with high-purity process gases.

Applications:

The Tylan FC-261 Mass Flow Controller is commonly used in semiconductor wafer fabrication, gas blending systems, chemical vapor deposition (CVD), plasma etching equipment, analytical laboratories, photovoltaic manufacturing, and industrial process control. Calibrated for oxygen (O₂), it provides closed-loop thermal mass flow control independent of pressure and temperature variations, making it ideal for applications requiring accurate gas delivery and long-term stability.

Technical Specifications:

• Brand: Tylan General (Millipore)
• Model: FC-261
• Series: 260 Series
• Product Type: Thermal Mass Flow Controller
• Gas Calibration: Oxygen (O₂)
• Full Scale Flow Rate: 7 SLPM
• Maximum Operating Pressure: 150 PSIG
• Measurement Principle: Thermal Mass Flow
• Control Range: 50:1 (100% to 2% Full Scale)
• Accuracy: ±1% Full Scale
• Repeatability: ±0.2% Full Scale
• Wetted Materials: Type 316 Stainless Steel
• Seal Material: Viton®, Kalrez®, or Neoprene (application dependent)
• Output Signal: 0–5 VDC Analog
• Power Supply: ±15 VDC
• Application: Semiconductor Gas Delivery, Laboratory Gas Control, and Industrial Process Systems

Common Replacements:

• Brooks 5850E Series 7 SLPM Mass Flow Controller
• MKS Instruments 1179A 7 SLPM Mass Flow Controller
• Horiba STEC SEC-4400 Series 7 SLPM Mass Flow Controller