Tylan FC-2900-10SLM-H2 Thermal Mass Flow Controller

Description:

The Tylan FC-2900 Mass Flow Controller is a high-precision thermal mass flow controller designed to accurately measure and regulate hydrogen (H₂) gas flow in semiconductor manufacturing, laboratory, and industrial process applications. Commonly installed in semiconductor process tools, gas delivery panels, chemical vapor deposition (CVD) systems, analytical instruments, and research laboratories requiring a full-scale flow capacity of 10 SLM. Maintenance technicians, process engineers, and system integrators use this controller for equipment repair, calibration, process optimization, and replacement of worn OEM mass flow controllers to ensure accurate and repeatable gas delivery. The FC-2900 Series is rated for a maximum operating pressure of 150 PSIG and features a corrosion-resistant Type 316 stainless steel flow path.

Applications:

The Tylan FC-2900 Mass Flow Controller is commonly used in semiconductor wafer fabrication, hydrogen gas delivery systems, plasma processing equipment, gas blending panels, fuel cell research, analytical laboratories, and industrial process control. Calibrated for hydrogen (H₂), it provides closed-loop thermal mass flow control that is independent of pressure and temperature variations, making it suitable for high-purity gas applications requiring exceptional accuracy and stability.

Technical Specifications:

• Brand: Tylan General (Millipore)
• Model: FC-2900
• Series: 2900 Series
• Product Type: Thermal Mass Flow Controller
• Gas Calibration: Hydrogen (H₂)
• Full Scale Flow Rate: 10 SLM (Standard Liters per Minute)
• Maximum Operating Pressure: 150 PSIG
• Measurement Principle: Thermal Mass Flow
• Control Type: Closed-Loop Proportional Control
• Wetted Materials: Type 316 Stainless Steel
• Seal Material: Elastomer (configuration dependent)
• Electrical Output: Analog Signal (configuration dependent)
• Power Supply: ±15 VDC (configuration dependent)
• Application: Semiconductor Gas Delivery, Laboratory Gas Control, and Industrial Process Systems

Common Replacements:

• Brooks 5850E Series 10 SLM Hydrogen Mass Flow Controller
• MKS Instruments 1179A 10 SLM Hydrogen Mass Flow Controller
• Horiba STEC SEC-E40 Series 10 SLM Hydrogen Mass Flow Controller