Tylan Millipore FM-380SAV Mass Flow Transducer

Description:

The Tylan Millipore FM-380SAV Air Mass Flow Transducer 50 SCCM is used in precision gas flow measurement systems for semiconductor manufacturing, laboratory instrumentation, and industrial process automation. Commonly installed in gas delivery systems, vacuum processing equipment, analytical instruments, and research laboratories requiring accurate air flow monitoring. Maintenance teams and system integrators use this mass flow transducer for repair, retrofit, replacement, and process automation upgrades. 

Applications:

The Tylan Millipore FM-380SAV Mass Flow Transducer is designed to accurately measure air flow in high-purity gas delivery applications without active flow control. It is widely used in semiconductor fabrication, chemical vapor deposition (CVD) systems, vacuum coating equipment, gas distribution panels, analytical instrumentation, calibration systems, and laboratory environments where precise air flow measurement is essential.

Technical Specifications:

• Manufacturer: Tylan General (Millipore)
• Part Number: FM-380SAV
• Product Type: Mass Flow Transducer
• Function: Precision Air Flow Measurement
• Application: Semiconductor Processing, Laboratory, and Industrial Gas Monitoring Systems
• Compatible Equipment: Tylan FM-380 Series Gas Flow Measurement Systems
• Series: FM-380 Series
• Flow Capacity: 50 SCCM
• Calibration Gas: Air
• Measurement Type: Thermal Mass Flow Measurement
• Input/Output Signal: 0–5 VDC (Model Dependent)
• Power Supply: ±12 to ±18 VDC (±15 VDC Nominal)
• Wetted Materials: 316L Stainless Steel with Corrosion-Resistant Internal Components
• Mounting Type: Inline Process Installation
• Industrial Duty Construction
• Designed for Continuous Service Operation
• OEM Replacement Mass Flow Transducer

Common Replacements:

• Tylan Millipore FM-380SAV 20 SCCM Air Mass Flow Transducer
• Tylan Millipore FM-380SAV 100 SCCM Air Mass Flow Transducer
• Tylan Millipore FM-380SAV 200 SCCM Air Mass Flow Transducer