Tylan Technologies VC-4900MEPR Vapor Flow Controller

Description:

The TYLAN VC-4900MEPR Vapor Flow Controller is used in precision vapor delivery systems for semiconductor manufacturing and advanced industrial process applications. Commonly installed in chemical vapor deposition (CVD) equipment, gas delivery panels, vaporization systems, and semiconductor process tools requiring accurate low-pressure vapor flow control. Maintenance teams and system integrators use this vapor flow controller for repair, retrofit, replacement, and process automation upgrades.

Applications:

The TYLAN VC-4900MEPR Vapor Flow Controller is designed to accurately control the flow of low vapor pressure process chemicals in high-purity manufacturing environments. It is widely used in semiconductor fabrication, CVD systems, vapor delivery systems for organometallic precursors such as TEOS, TMP, and TMB, thin-film deposition equipment, research laboratories, and industrial process automation where stable and repeatable vapor flow is essential.

Technical Specifications:

• Manufacturer: TYLAN General (Millipore)
• Part Number: VC-4900MEPR
• Product Type: Vapor Flow Controller
• Function: Precision Vapor Flow Measurement and Control
• Application: Semiconductor Vapor Delivery and Industrial Process Systems
• Compatible Equipment: TYLAN VC-4900 Series Vapor Delivery Systems and Semiconductor Process Equipment
• Series: VC-4900 Series
• Controller Type: Thermal Mass Vapor Flow Controller
• Process Media: Low Vapor Pressure Liquids and Organometallic Vapors
• Construction Material: 316L Stainless Steel Wetted Surfaces
• Seal Type: Metal Seal (MEPR Configuration)
• Input/Output Signal: 0–5 VDC / 4–20 mA (Model Dependent)
• Power Supply: ±15 VDC Nominal
• Operating Temperature: Up to 100°C (with Remote Electronics)
• Mounting Type: Inline Process Installation
• Industrial Duty Construction
• Designed for Continuous Service Operation
• OEM Replacement Vapor Flow Controller

Common Replacements:

• TYLAN VC-4900VR Vapor Flow Controller
• TYLAN VC-4901MEPR Vapor Flow Controller
• TYLAN VC-4901VR Vapor Flow Controller