Ultratech 01-08-05872-06 Wafer Chuck 5 Inch Assembly

Description:

The Ultratech Stepper 01-08-05872-06 Tazmo 5" Wafer Chuck Rev. A is used in semiconductor photolithography systems to securely hold and precisely position 5-inch wafers during exposure and alignment processes. Commonly installed in Ultratech wafer steppers, semiconductor fabrication equipment, and cleanroom manufacturing facilities requiring high-precision wafer handling. Maintenance teams and semiconductor equipment service providers use this wafer chuck for equipment repairs, preventive maintenance, and replacement of worn or damaged wafer holding assemblies.

Applications:

The Ultratech Stepper 01-08-05872-06 Tazmo 5" Wafer Chuck Rev. A is commonly used in semiconductor wafer steppers, photolithography systems, wafer alignment stations, automated wafer handling equipment, and cleanroom manufacturing environments requiring secure vacuum chucking and precise wafer positioning during semiconductor production.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 01-08-05872-06 Rev. A
• Product Type: Tazmo 5" Wafer Chuck
• Wafer Size: 5 in.
• Function: Wafer holding and positioning assembly
• Chuck Type: Precision Vacuum Wafer Chuck
• System Compatibility: Ultratech Wafer Stepper Systems
• Installation: Direct OEM Replacement
• Application: Semiconductor Photolithography Equipment
• Industrial Applications: Semiconductor Manufacturing and Cleanroom Wafer Fabrication

Common Replacements:

• Ultratech Stepper 01-08-05872-05 Tazmo Chuck 5" Assembly
• Ultratech Stepper 01-08-05871-04 Tazmo 4" Chuck Assembly
• Ultratech Stepper 5-1/2" Wafer Chuck Housing Assembly