Ultratech 01-20-08947 Wafer Chuck Assembly PCB Reticle

Description:

The Ultratech Stepper 01-20-08947 Wafer Chuck Assembly PCB Reticle is a precision wafer handling assembly designed to securely hold and accurately position semiconductor wafers during photolithography processes. Commonly installed in Ultratech wafer steppers used in semiconductor fabrication, MEMS manufacturing, and advanced packaging applications. Semiconductor equipment technicians and field service engineers use this assembly for replacement of worn wafer stage components, preventive maintenance, and restoration of precise wafer positioning and exposure accuracy. This assembly features a 7-3/4-inch wafer chuck with an integrated PCB reticle interface for high-precision lithography applications.

Applications:

The Ultratech Stepper 01-20-08947 Wafer Chuck Assembly is commonly used in semiconductor wafer fabrication facilities, research laboratories, and electronics manufacturing environments operating Ultratech 4700, 6700, Titan, and Saturn wafer steppers. The assembly provides stable vacuum wafer retention and precise stage positioning while the PCB reticle interface supports communication with the lithography control system, ensuring accurate wafer alignment and repeatable pattern registration. Compatibility should be verified using the original part number and applicable Ultratech stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 01-20-08947
• Product Type: Wafer Chuck Assembly
• Configuration: PCB Reticle Assembly
• Chuck Diameter: 7-3/4 in.
• Chuck Type: Vacuum Wafer Chuck
• Function: Precision wafer holding and positioning
• Compatible Equipment: Ultratech 4700, 6700, Titan, and Saturn Wafer Stepper Systems
• Mounting: OEM replacement assembly
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography and wafer handling systems
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 01-20-03947
• Ultratech Stepper 01-20-02645
• Ultratech Stepper 01-20-03651