Ultratech 03-06-00038 Stage Driver Board Assembly

Description:

The Ultratech Stepper 03-06-00038 Stage Driver Board is an industrial motion control printed circuit board (PCB) designed to control and amplify drive signals for the precision stage positioning system in Ultratech wafer steppers. Commonly installed in Ultratech 1100 and 1500 semiconductor photolithography systems where it provides accurate motion control for the wafer stage during alignment and exposure processes. Semiconductor equipment technicians and field service engineers use this board for replacement of failed stage driver electronics, preventive maintenance, and restoration of precise stage motion and lithography performance.

Applications:

The Ultratech Stepper 03-06-00038 Stage Driver Board is commonly used in semiconductor wafer fabrication, MEMS manufacturing, advanced packaging, and research facilities operating Ultratech 1100 and 1500 wafer steppers. The board functions as the stage amplifier, delivering controlled drive signals to the stage motors for smooth, repeatable X-Y positioning during photolithography. Compatibility should be verified using the original part number, revision level, and applicable stepper model before installation.

Technical Specifications:

• Brand: Ultratech Stepper
• Part Number: 03-06-00038
• Revision: Rev. B (application dependent)
• Product Type: Stage Driver Board / Stage Amplifier PCB
• Function: Motion control and stage drive amplification
• Compatible Equipment: Ultratech 1100 and 1500 Wafer Stepper Systems
• Board Type: Industrial Motion Control PCB
• Mounting: OEM replacement board
• Installation: Direct OEM replacement
• Application: Semiconductor photolithography stage control
• Designed for continuous-duty semiconductor manufacturing operation.

Common Replacements:

• Ultratech Stepper 0553-602400
• Ultratech Stepper 03-08-00096
• Ultratech Stepper 03-06-00035